Olav Solgaard
Professor of Electrical Engineering
Bio
The Solgaard group focus on design and fabrication of nano-photonics and micro-optical systems. We combine photonic crystals, optical meta-materials, silicon photonics, and MEMS, to create efficient and reliable systems for communication, sensing, imaging, and optical manipulation.
Academic Appointments
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Professor, Electrical Engineering
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Member, Bio-X
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Affiliate, Precourt Institute for Energy
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Member, Stanford Cancer Institute
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Member, Stanford Neurosciences Institute
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Affiliate, Stanford Woods Institute for the Environment
Honors & Awards
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Fellow, Norwegian Academy of Technological Sciences (2010)
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Member, The Royal Norwegian Society of Sciences and Letters (2008)
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Fellow, Optical Society of America (2008)
Professional Education
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PhD, Stanford (1992)
2014-15 Courses
- Photonics Laboratory
EE 234 (Aut) -
Independent Studies (12)
- Curricular Practical Training for Electrical Engineers
EE 290A (Aut, Win, Spr, Sum) - Curricular Practical Training for Electrical Engineers
EE 290B (Aut, Win, Spr, Sum) - Curricular Practical Training for Electrical Engineers
EE 290C (Aut, Win, Spr, Sum) - Curricular Practical Training for Electrical Engineers
EE 290D (Aut, Win, Spr, Sum) - Directed Studies in Applied Physics
APPPHYS 290 (Aut, Win, Spr, Sum) - Master's Thesis and Thesis Research
EE 300 (Aut, Win, Spr, Sum) - Practical Training
APPPHYS 291 (Sum) - Special Studies and Reports in Electrical Engineering
EE 191 (Aut, Win, Spr) - Special Studies and Reports in Electrical Engineering
EE 391 (Aut, Win, Spr, Sum) - Special Studies and Reports in Electrical Engineering (WIM)
EE 191W (Aut, Win, Spr) - Special Studies or Projects in Electrical Engineering
EE 190 (Aut, Win, Spr) - Special Studies or Projects in Electrical Engineering
EE 390 (Aut, Win, Spr, Sum)
- Curricular Practical Training for Electrical Engineers
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Prior Year Courses
2013-14 Courses
- Photonics Laboratory
EE 234 (Aut) - Physics of Electrical Engineering
EE 41, ENGR 40P (Win)
2012-13 Courses
- Micro and Nano Optical Device Design
EE 334 (Spr) - Optics and Electronics Seminar
APPPHYS 483 (Spr) - Photonics Laboratory
EE 234 (Aut) - Physics of Electrical Engineering
EE 41, ENGR 40P (Win)
2011-12 Courses
- Advanced Nanofabrication Laboratory
EE 412 (Spr) - Photonics Laboratory
EE 234 (Aut) - Physics of Electrical Engineering
EE 41, ENGR 40P (Win)
- Photonics Laboratory
Journal Articles
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Two-axis MEMS scanner with transfer-printed high-reflectivity, broadband monolithic silicon photonic crystal mirrors
OPTICS EXPRESS
2013; 21 (11): 13800-13809
Abstract
We present a two-axis electrostatic MEMS scanner with high-reflectivity monolithic single-crystal-silicon photonic crystal (PC) mirrors suitable for applications in harsh environments. The reflective surfaces of the MEMS scanner are transfer-printed PC mirrors with low polarization dependence, low angular dependence, and reflectivity over 85% in the wavelength range of 1490nm~1505nm and above 90% over the wavelength band of 1550~1570nm. In static mode, the scanner has total scan range of 10.2° on one rotation axis and 7.8° on the other. Dynamic operation on resonance increase the scan range to 21° at 608Hz around the outer rotation axis and 9.5° at 1.73kHz about the inner rotation axis.
View details for DOI 10.1364/OE.21.013800
View details for Web of Science ID 000319814900085
View details for PubMedID 23736634
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Measurement of elastic properties in fluid using high bandwidth atomic force microscope probes
APPLIED PHYSICS LETTERS
2013; 102 (10)
View details for DOI 10.1063/1.4795598
View details for Web of Science ID 000316501200074
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MONOLITHIC SILICON WAVEGUIDES IN STANDARD SILICON
IEEE MICRO
2013; 33 (1): 32-40
View details for Web of Science ID 000315007400006
- Modeling and Demonstration of Thermally Stable High-Sensitivity Reproducible Acoustic Sensors Journal of Lightwave Technology 2013; 31 (16): 2701-2708
- Fano resonances in integrated silicon Bragg reflectors for sensing applications Optics Express 2013; 21 (22): 2720927219
- Engineering-reflected phase in Fabry–Perot sensors with resonant mirrors Optics Letters 2013; 38 (23): 4992–4995
- Detection of single nano-defects in photonic crystals between crossed polarizers Optics Express 2013; 21 (25): 31375–31389
- Short-cavity multimode fiber-tip Fabry-Pérot sensors Optics Express 2013; 21 (6): 14487–14499
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Modeling and Demonstration of Thermally Stable High-Sensitivity Reproducible Acoustic Sensors
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
2012; 21 (6): 1347-1356
View details for DOI 10.1109/JMEMS.2012.2196494
View details for Web of Science ID 000311854500013
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Split-Frame Gimbaled Two-Dimensional MEMS Scanner for Miniature Dual-Axis Confocal Microendoscopes Fabricated by Front-Side Processing
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
2012; 21 (2): 308-315
View details for DOI 10.1109/JMEMS.2011.2175368
View details for Web of Science ID 000302535800009
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Photonic-crystal membranes for optical detection of single nano-particles, designed for biosensor application
OPTICS EXPRESS
2012; 20 (7): 7954-7965
Abstract
A sensor designed to detect bio-molecules is presented. The sensor exploits a planar 2D photonic crystal (PC) membrane with sub-micron thickness and through holes, to induce high optical fields that allow detection of nano-particles smaller than the diffraction limit of an optical microscope. We report on our design and fabrication of a PC membrane with a nano-particle trapped inside. We have also designed and built an imaging system where an optical microscope and a CCD camera are used to take images of the PC membrane. Results show how the trapped nano-particle appears as a bright spot in the image. In a first experimental realization of the imaging system, single particles with a radius of 75 nm can be detected.
View details for Web of Science ID 000302138800107
View details for PubMedID 22453468
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Reflectivity and polarization dependence of polysilicon single-film broadband photonic crystal micro-mirrors
OPTICS EXPRESS
2012; 20 (6): 6306-6315
Abstract
We report on the fabrication of 2-D photonic crystal (PC) micro-mirrors, and Finite Difference Time Domain (FDTD) simulations and measurements of their reflectance spectra and polarization dependence at normal incidence. The PC mirrors were fabricated in free-standing thin polysilicon membranes supported by silicon nitride films for stress compensation. Greater than 90% reflectivity is measured over a wavelength range of 35 nm from 1565 nm to 1600 nm with small polarization dependence. Our FDTD simulations show that fabrication errors on the order of tens of nanometers can strongly affect the reflection spectra. When the fabrication errors are kept below this level, FDTD simulations on perfectly periodic structures accurately predict the reflection spectra of the fabricated PC mirrors, despite their sensitivity to the fabrication errors.
View details for Web of Science ID 000301877700077
View details for PubMedID 22418512
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In vivo near-infrared dual-axis confocal microendoscopy in the human lower gastrointestinal tract
JOURNAL OF BIOMEDICAL OPTICS
2012; 17 (2)
Abstract
Near-infrared confocal microendoscopy is a promising technique for deep in vivo imaging of tissues and can generate high-resolution cross-sectional images at the micron-scale. We demonstrate the use of a dual-axis confocal (DAC) near-infrared fluorescence microendoscope with a 5.5-mm outer diameter for obtaining clinical images of human colorectal mucosa. High-speed two-dimensional en face scanning was achieved through a microelectromechanical systems (MEMS) scanner while a micromotor was used for adjusting the axial focus. In vivo images of human patients are collected at 5 frames/sec with a field of view of 362×212 ?m(2) and a maximum imaging depth of 140 ?m. During routine endoscopy, indocyanine green (ICG) was topically applied a nonspecific optical contrasting agent to regions of the human colon. The DAC microendoscope was then used to obtain microanatomic images of the mucosa by detecting near-infrared fluorescence from ICG. These results suggest that DAC microendoscopy may have utility for visualizing the anatomical and, perhaps, functional changes associated with colorectal pathology for the early detection of colorectal cancer.
View details for DOI 10.1117/1.JBO.17.2.021102
View details for Web of Science ID 000303033600004
View details for PubMedID 22463020
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Tapping-mode force spectroscopy using cantilevers with interferometric high-bandwidth force sensors
APPLIED PHYSICS LETTERS
2012; 100 (5)
View details for DOI 10.1063/1.3679683
View details for Web of Science ID 000300065300065
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Photonic Crystal Fiber Tip Sensor for High-Temperature Measurement
IEEE SENSORS JOURNAL
2011; 11 (11): 2643-2648
View details for DOI 10.1109/JSEN.2011.2153844
View details for Web of Science ID 000304162300004
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Multilayered Monolithic Silicon Photonic Crystals
IEEE PHOTONICS TECHNOLOGY LETTERS
2011; 23 (11): 730-732
View details for DOI 10.1109/LPT.2011.2132698
View details for Web of Science ID 000290629800008
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High-Resolution Nanomechanical Mapping Using Interferometric-Force-Sensing AFM Probes
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
2011; 20 (3): 654-664
View details for DOI 10.1109/JMEMS.2011.2127452
View details for Web of Science ID 000291316000015
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Optical design and imaging performance testing of a 9.6-mm diameter femtosecond laser microsurgery probe
OPTICS EXPRESS
2011; 19 (11): 10536-10552
Abstract
We present the optical design of a 9.6-mm diameter fiber-coupled probe for combined femtosecond laser microsurgery and nonlinear optical imaging. Towards enabling clinical use, we successfully reduced the dimensions of our earlier 18-mm microsurgery probe by half, while improving optical performance. We use analytical and computational models to optimize the miniaturized lens system for off-axis scanning aberrations. The optimization reveals that the optical system can be aberration-corrected using simple aspheric relay lenses to achieve diffraction-limited imaging resolution over a large field of view. Before moving forward with custom lenses, we have constructed the 9.6-mm probe using off-the-shelf spherical relay lenses and a 0.55 NA aspheric objective lens. In addition to reducing the diameter by nearly 50% and the total volume by 5 times, we also demonstrate improved lateral and axial resolutions of 1.27 µm and 13.5 µm, respectively, compared to 1.64 µm and 16.4 µm in our previous work. Using this probe, we can successfully image various tissue samples, such as rat tail tendon that required 2-3 × lower laser power than the current state-of-the-art. With further development, image-guided, femtosecond laser microsurgical probes such as this one can enable physicians to achieve the highest level of surgical precision anywhere inside the body.
View details for Web of Science ID 000290852800048
View details for PubMedID 21643308
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In Vivo Imaging of Human and Mouse Skin with a Handheld Dual-Axis Confocal Fluorescence Microscope
JOURNAL OF INVESTIGATIVE DERMATOLOGY
2011; 131 (5): 1061-1066
Abstract
Advancing molecular therapies for the treatment of skin diseases will require the development of new tools that can reveal spatiotemporal changes in the microanatomy of the skin and associate these changes with the presence of the therapeutic agent. For this purpose, we evaluated a handheld dual-axis confocal (DAC) microscope that is capable of in vivo fluorescence imaging of skin, using both mouse models and human skin. Individual keratinocytes in the epidermis were observed in three-dimensional image stacks after topical administration of near-infrared (NIR) dyes as contrast agents. This suggested that the DAC microscope may have utility in assessing the clinical effects of a small interfering RNA (siRNA)-based therapeutic (TD101) that targets the causative mutation in pachyonychia congenita (PC) patients. The data indicated that (1) formulated indocyanine green (ICG) readily penetrated hyperkeratotic PC skin and normal callused regions compared with nonaffected areas, and (2) TD101-treated PC skin revealed changes in tissue morphology, consistent with reversion to nonaffected skin compared with vehicle-treated skin. In addition, siRNA was conjugated to NIR dye and shown to penetrate through the stratum corneum barrier when topically applied to mouse skin. These results suggest that in vivo confocal microscopy may provide an informative clinical end point to evaluate the efficacy of experimental molecular therapeutics.
View details for DOI 10.1038/jid.2010.401
View details for Web of Science ID 000289789900014
View details for PubMedID 21191407
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Highly Sensitive Monolithic Silicon Photonic Crystal Fiber Tip Sensor for Simultaneous Measurement of Refractive Index and Temperature
JOURNAL OF LIGHTWAVE TECHNOLOGY
2011; 29 (9): 1367-1374
View details for DOI 10.1109/JLT.2011.2126018
View details for Web of Science ID 000289802300007
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Miniature photonic-crystal hydrophone optimized for ocean acoustics
JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA
2011; 129 (4): 1837-1850
Abstract
This work reports on an optical hydrophone that is insensitive to hydrostatic pressure, yet capable of measuring acoustic pressures as low as the background noise in the ocean in a frequency range of 1 Hz to 100 kHz. The miniature hydrophone consists of a Fabry-Perot interferometer made of a photonic-crystal reflector interrogated with a single-mode fiber and is compatible with existing fiber-optic technologies. Three sensors with different acoustic power ranges placed within a sub-wavelength sized hydrophone head allow a high dynamic range in the excess of 160 dB with a low harmonic distortion of better than -30 dB. A method for suppressing cross-coupling between sensors in the same hydrophone head is also proposed. A prototype was fabricated, assembled, and tested. The sensitivity was measured from 100 Hz to 100 kHz, demonstrating a sound-pressure-equivalent noise spectral density down to 12 ?Pa/Hz(1/2), a flatband wider than 10 kHz, and very low distortion.
View details for DOI 10.1121/1.3543949
View details for Web of Science ID 000289298600026
View details for PubMedID 21476640
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Modeling, design, and analysis of interferometric cantilevers for time-resolved force measurements in tapping-mode atomic force microscopy
JOURNAL OF APPLIED PHYSICS
2011; 109 (6)
View details for DOI 10.1063/1.3553852
View details for Web of Science ID 000289149900122
- High resolution nanomechanical mapping using interferometric-force-sensing AFM probes Journal of Microelectromechanical Systems 2011; 20 (3): 654-664
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Amplified spontaneous emission rejection with multi-functional MEMS tunable filter
ELECTRONICS LETTERS
2010; 46 (18): 1275-U57
View details for DOI 10.1049/el.2010.0957
View details for Web of Science ID 000281693800022
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Miniaturization of free space optical systems
APPLIED OPTICS
2010; 49 (25): F18-F31
Abstract
Coherent illumination enables not only integrated optics, but also miniaturized free-space optics that takes advantage of the amplitude and phase control afforded by optical microelectromechanical systems (MEMS) and photonic crystals. These technologies also provide a practical and cost-effective means for integration and packaging of optical systems. The properties of miniaturized optical systems based on optical MEMS and photonic crystals are described, and efficient analysis and design approaches to miniaturized optical scanners and tunable diffractive optical elements are demonstrated. The impact of photonic crystals on free-space micro-optics is discussed.
View details for Web of Science ID 000281748100025
View details for PubMedID 20820200
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Displacement Sensing With a Mechanically Tunable Photonic Crystal
IEEE PHOTONICS TECHNOLOGY LETTERS
2010; 22 (16): 1196-1198
View details for DOI 10.1109/LPT.2010.2050584
View details for Web of Science ID 000283537800004
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Photonic Components for Future Fiber Access Networks
IEEE JOURNAL ON SELECTED AREAS IN COMMUNICATIONS
2010; 28 (6): 928-935
View details for DOI 10.1109/JSAC.2010.100816
View details for Web of Science ID 000283383600016
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Multifunctional Tunable Optical Filter Using MEMS Spatial Light Modulator
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
2010; 19 (3): 610-618
View details for DOI 10.1109/JMEMS.2010.2043641
View details for Web of Science ID 000278537900018
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Assessing delivery and quantifying efficacy of small interfering ribonucleic acid therapeutics in the skin using a dual-axis confocal microscope
JOURNAL OF BIOMEDICAL OPTICS
2010; 15 (3)
Abstract
Transgenic reporter mice and advances in imaging instrumentation are enabling real-time visualization of cellular mechanisms in living subjects and accelerating the development of novel therapies. Innovative confocal microscope designs are improving their utility for microscopic imaging of fluorescent reporters in living animals. We develop dual-axis confocal (DAC) microscopes for such in vivo studies and create mouse models where fluorescent proteins are expressed in the skin for the purpose of advancing skin therapeutics and transdermal delivery tools. Three-dimensional image volumes, through the different skin compartments of the epidermis and dermis, can be acquired in several seconds with the DAC microscope in living mice, and are comparable to histologic analyses of reporter protein expression patterns in skin sections. Intravital imaging with the DAC microscope further enables visualization of green fluorescent protein (GFP) reporter gene expression in the skin over time, and quantification of transdermal delivery of small interfering RNA (siRNA) and therapeutic efficacy. Visualization of transdermal delivery of nucleic acids will play an important role in the development of innovative strategies for treating skin pathologies.
View details for DOI 10.1117/1.3432627
View details for Web of Science ID 000280642900042
View details for PubMedID 20615029
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Micromirror-scanned dual-axis confocal microscope utilizing a gradient-index relay lens for image guidance during brain surgery
JOURNAL OF BIOMEDICAL OPTICS
2010; 15 (2)
Abstract
A fluorescence confocal microscope incorporating a 1.8-mm-diam gradient-index relay lens is developed for in vivo histological guidance during resection of brain tumors. The microscope utilizes a dual-axis confocal architecture to efficiently reject out-of-focus light for high-contrast optical sectioning. A biaxial microelectromechanical system (MEMS) scanning mirror is actuated at resonance along each axis to achieve a large field of view with low-voltage waveforms. The unstable Lissajous scan, which results from actuating the orthogonal axes of the MEMS mirror at highly disparate resonance frequencies, is optimized to fully sample 500x500 pixels at two frames per second. Optically sectioned fluorescence images of brain tissues are obtained in living mice to demonstrate the utility of this microscope for image-guided resections.
View details for DOI 10.1117/1.3386055
View details for Web of Science ID 000278465300060
View details for PubMedID 20459274
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Two-Dimensional Photonic Crystals Fabricated in Monolithic Single-Crystal Silicon
IEEE PHOTONICS TECHNOLOGY LETTERS
2010; 22 (2): 67-69
View details for DOI 10.1109/LPT.2009.2036143
View details for Web of Science ID 000273091000001
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Asymmetrical Spectral Response in Fiber Fabry-Perot Interferometers (vol 27, pg 5648, 2009)
JOURNAL OF LIGHTWAVE TECHNOLOGY
2010; 28 (1): 188-188
View details for DOI 10.1109/JLT.2009.2039364
View details for Web of Science ID 000273569000001
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Asymmetrical Spectral Response in Fiber Fabry-Perot Interferometers
JOURNAL OF LIGHTWAVE TECHNOLOGY
2009; 27 (24): 5648-5656
View details for DOI 10.1109/JLT.2009.2032135
View details for Web of Science ID 000272479900001
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A Large-Area High-Reflectivity Broadband Monolithic Single-Crystal-Silicon Photonic Crystal Mirror MEMS Scanner With Low Dependence on Incident Angle and Polarization
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
2009; 15 (5): 1447-1454
View details for DOI 10.1109/JSTQE.2009.2021863
View details for Web of Science ID 000270950300023
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3-D Near-Infrared Fluorescence Imaging Using an MEMS-Based Miniature Dual-Axis Confocal Microscope
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
2009; 15 (5): 1344-1350
View details for DOI 10.1109/JSTQE.2009.2021533
View details for Web of Science ID 000270950300008
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Introduction to the Issue on Nanophotonics and Optical MEMS
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
2009; 15 (5): 1307-1309
View details for DOI 10.1109/JSTQE.2009.2024388
View details for Web of Science ID 000270950300001
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High-Reflectivity Broadband Photonic Crystal Mirror MEMS Scanner With Low Dependence on Incident Angle and Polarization
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
2009; 18 (4): 924-932
View details for DOI 10.1109/JMEMS.2009.2021814
View details for Web of Science ID 000268641700018
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siRNA silencing of keratinocyte-specific GFP expression in a transgenic mouse skin model
GENE THERAPY
2009; 16 (8): 963-972
Abstract
Small interfering RNAs (siRNAs) can be designed to specifically and potently target and silence a mutant allele, with little or no effect on the corresponding wild-type allele expression, presenting an opportunity for therapeutic intervention. Although several siRNAs have entered clinical trials, the development of siRNA therapeutics as a new drug class will require the development of improved delivery technologies. In this study, a reporter mouse model (transgenic click beetle luciferase/humanized monster green fluorescent protein) was developed to enable the study of siRNA delivery to skin; in this transgenic mouse, green fluorescent protein reporter gene expression is confined to the epidermis. Intradermal injection of siRNAs targeting the reporter gene resulted in marked reduction of green fluorescent protein expression in the localized treatment areas as measured by histology, real-time quantitative polymerase chain reaction and intravital imaging using a dual-axes confocal fluorescence microscope. These results indicate that this transgenic mouse skin model, coupled with in vivo imaging, will be useful for development of efficient and 'patient-friendly' siRNA delivery techniques and should facilitate the translation of siRNA-based therapeutics to the clinic for treatment of skin disorders.
View details for DOI 10.1038/gt.2009.62
View details for Web of Science ID 000268916800004
View details for PubMedID 19474811
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In vivo brain imaging using a portable 2.9 g two-photon microscope based on a microelectromechanical systems scanning mirror
OPTICS LETTERS
2009; 34 (15): 2309-2311
Abstract
We present a two-photon microscope that is approximately 2.9 g in mass and 2.0 x 1.9 x 1.1 cm(3) in size and based on a microelectromechanical systems (MEMS) laser-scanning mirror. The microscope has a focusing motor and a micro-optical assembly composed of four gradient refractive index lenses and a dichroic microprism. Fluorescence is captured without the detected emissions reflecting off the MEMS mirror, by use of separate optical fibers for fluorescence collection and delivery of ultrashort excitation pulses. Using this microscope we imaged neocortical microvasculature and tracked the flow of erythrocytes in live mice.
View details for Web of Science ID 000269405900022
View details for PubMedID 19649080
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Vertical Mirror Fabrication Combining KOH Etch and DRIE of (110) Silicon
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
2009; 18 (1): 217-227
View details for DOI 10.1109/JMEMS.2008.2009840
View details for Web of Science ID 000263123100022
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Analysis of guided-resonance-based polarization beam splitting in photonic crystal slabs
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION
2008; 25 (11): 2680-2692
Abstract
We present an analysis of the phase and amplitude responses of guided resonances in a photonic crystal slab. Through this analysis, we obtain the general rules and conditions under which a photonic crystal slab can be employed as a general elliptical polarization beam splitter, separating an incoming beam equally into its two orthogonal constituents, so that half the power is reflected in one polarization state, and half the power is transmitted in the other state. We show that at normal incidence a photonic crystal slab acts as a dual quarter-wave retarder in which the fast and slow axes are switched for reflection and transmission. We also analyze the case where such a structure operates at oblique incidences. As a result we show that the effective dielectric constant of the photonic crystal slab imposes the Brewster angle as a boundary, separating two ranges of angles with different mechanisms of polarization beam splitting. We show that the diattenuation can be tuned from zero to one to make the structure a circular or linear polarization beam splitter. We verify our analytical analysis through finite-difference time-domain simulations and experimental measurements at infrared wavelengths.
View details for Web of Science ID 000261520700008
View details for PubMedID 18978845
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Pull-In Analysis of Torsional Scanners Actuated by Electrostatic Vertical Combdrives
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
2008; 17 (5): 1228-1238
View details for DOI 10.1109/JMEMS.2008.2004824
View details for Web of Science ID 000260464800019
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Controlling uncoupled resonances in photonic crystals through breaking the mirror symmetry
OPTICS EXPRESS
2008; 16 (17): 13090-13103
Abstract
We show that modes in a photonic crystal slab that are uncoupled to outside radiation in a symmetric structure can be excited by breaking the mirror symmetry through introducing a protrusion on the side of the photonic crystal holes. We show that coupling to these resonances can be controlled by the strength of this asymmetry, and that it is also possible to choose among modes to couple to, through the shape of the asymmetry introduced. We provide simple theoretical arguments that explain the effect, and present eigenmode simulations and time-domain simulations. We confirm this predicted behavior with measurements on a photonic crystal with a broken mirror symmetry that exhibits an additional sharp resonant feature with a linewidth of 0.5 nm, in agreement with both calculated and simulated predictions.
View details for Web of Science ID 000259268700070
View details for PubMedID 18711548
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Cantilevers with integrated sensor for time-resolved force measurement in tapping-mode atomic force microscopy
APPLIED PHYSICS LETTERS
2008; 93 (2)
View details for DOI 10.1063/1.2959828
View details for Web of Science ID 000257796100091
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Miniaturized probe for femtosecond laser microsurgery and two-photon imaging
OPTICS EXPRESS
2008; 16 (13): 9996-10005
Abstract
Combined two-photon fluorescence microscopy and femtosecond laser microsurgery has many potential biomedical applications as a powerful "seek-and-treat" tool. Towards developing such a tool, we demonstrate a miniaturized probe which combines these techniques in a compact housing. The device is 10 x 15 x 40 mm(3) in size and uses an aircore photonic crystal fiber to deliver femtosecond laser pulses at 80 MHz repetition rate for imaging and 1 kHz for microsurgery. A fast two-axis microelectromechanical system scanning mirror is driven at resonance to produce Lissajous beam scanning at 10 frames per second. Field of view is 310 microm in diameter and the lateral and axial resolutions are 1.64 microm and 16.4 microm, respectively. Combined imaging and microsurgery is demonstrated using live cancer cells.
View details for Web of Science ID 000257563900082
View details for PubMedID 18575570
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Three-dimensional in vivo imaging by a handheld dual-axes confocal microscope
OPTICS EXPRESS
2008; 16 (10): 7224-7232
Abstract
We present a handheld dual-axes confocal microscope that is based on a two-dimensional microelectromechanical systems (MEMS) scanner. It performs reflectance and fluorescence imaging at 488 nm wavelength, with three-dimensional imaging capability. The fully packaged microscope has a diameter of 10 mm and acquires images at 4 Hz frame rate with a maximum field of view of 400 microm x 260 microm. The transverse and axial resolutions of the handheld probe are 1.7 microm and 5.8 microm, respectively. Capability to perform real time small animal imaging is demonstrated in vivo in transgenic mice.
View details for Web of Science ID 000256469800048
View details for PubMedID 18545427
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Scalable optical switches with large port count based on a waveguide grating router and passive couplers
IEEE PHOTONICS TECHNOLOGY LETTERS
2008; 20 (5-8): 508-510
View details for DOI 10.1109/LPT.2008.918237
View details for Web of Science ID 000257952800061
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Reconfigurable optical wavelength multiplexer using a MEMS tunable blazed grating
JOURNAL OF LIGHTWAVE TECHNOLOGY
2007; 25 (10): 3100-3107
View details for DOI 10.1109/JLT.2007.904427
View details for Web of Science ID 000250846000027
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An atomic force microscope tip designed to measure time-varying nanomechanical forces
NATURE NANOTECHNOLOGY
2007; 2 (8): 507-514
Abstract
Tapping-mode atomic force microscopy (AFM), in which the vibrating tip periodically approaches, interacts and retracts from the sample surface, is the most common AFM imaging method. The tip experiences attractive and repulsive forces that depend on the chemical and mechanical properties of the sample, yet conventional AFM tips are limited in their ability to resolve these time-varying forces. We have created a specially designed cantilever tip that allows these interaction forces to be measured with good (sub-microsecond) temporal resolution and material properties to be determined and mapped in detail with nanoscale spatial resolution. Mechanical measurements based on these force waveforms are provided at a rate of 4 kHz. The forces and contact areas encountered in these measurements are orders of magnitude smaller than conventional indentation and AFM-based indentation techniques that typically provide data rates around 1 Hz. We use this tool to quantify and map nanomechanical changes in a binary polymer blend in the vicinity of its glass transition.
View details for DOI 10.1038/nnano.2007.226
View details for Web of Science ID 000249062900016
View details for PubMedID 18654349
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Two-dimensional MEMS scanner for dual-axes confocal microscopy
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
2007; 16 (4): 969-976
View details for DOI 10.1109/JMEMS.2007.892900
View details for Web of Science ID 000248578700021
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Fiber-optic confocal microscope using a MEMS scanner and miniature objective lens
OPTICS EXPRESS
2007; 15 (15): 9113-9122
Abstract
We designed and constructed a single-fiber-optic confocal microscope (SFCM) with a microelectromechanical system (MEMS) scanner and a miniature objective lens. Axial and lateral resolution values for the system were experimentally measured to be 9.55 mum and 0.83 mum respectively, in good agreement with theoretical predictions. Reflectance images were acquired at a rate of 8 frames per second, over a 140 mum x 70 mum field-of-view. In anticipation of future applications in oral cancer detection, we imaged ex vivo and in vivo human oral tissue with the SFCM, demonstrating the ability of the system to resolve cellular detail.
View details for Web of Science ID 000248394500002
View details for PubMedID 19547251
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Introduction to the issue on optical micro- and nanosystems
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
2007; 13 (2): 145-146
View details for DOI 10.1109/JSTQE.2007.894188
View details for Web of Science ID 000246123200001
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Optical pattern generation using a, spatial light modulator for maskless lithography
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
2007; 13 (2): 147-154
View details for DOI 10.1109/JSTQE.2006.893095
View details for Web of Science ID 000246123200002
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Single-crystal-silicon continuous membrane deformable mirror array for adaptive optics in space-based telescopes
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
2007; 13 (2): 162-167
View details for DOI 10.1109/JSTQE.2007.893560
View details for Web of Science ID 000246123200004
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Superresolution digital image enhancement by subpixel image translation with a scanning micromirror
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
2007; 13 (2): 304-311
View details for DOI 10.1109/JSTQE.2006.893110
View details for Web of Science ID 000246123200023
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Miniature near-infrared dual-axes confocal microscope utilizing a two-dimensional microelectromechanical systems scanner
OPTICS LETTERS
2007; 32 (3): 256-258
Abstract
The first, to our knowledge, miniature dual-axes confocal microscope has been developed, with an outer diameter of 10 mm, for subsurface imaging of biological tissues with 5-7 microm resolution. Depth-resolved en face images are obtained at 30 frames per second, with a field of view of 800 x 100 microm, by employing a two-dimensional scanning microelectromechanical systems mirror. Reflectance and fluorescence images are obtained with a laser source at 785 nm, demonstrating the ability to perform real-time optical biopsy.
View details for Web of Science ID 000244278900018
View details for PubMedID 17215937
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Algorithms for the synthesis of complex-value spectral filters with an array of micromechanical mirrors
OPTICS EXPRESS
2006; 14 (26): 12590-12612
Abstract
We study optical spectral filter synthesis with arrays of piston-actuated micro-mirrors. We propose two algorithms for the calculation of the positions of the micro-mirrors, giving us control of both the amplitude and phase of the synthetic filter. Both algorithms for filter synthesis are explored in an analytic version and in numerical searches for the least deviations between the target and the synthesized filter. We measure the quality of the filter both in terms of the deviations and in filter transmissivity, and present results of numerical simulations for a wide selection of target filters. We find that numerical searches can sometimes yield considerable improvement in the filter synthesis compared to the analytic approximation.
View details for Web of Science ID 000243144600005
View details for PubMedID 19532151
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Tunable optical bandpass filter with variable-aperture MEMS reflector
JOURNAL OF LIGHTWAVE TECHNOLOGY
2006; 24 (12): 5095-5102
View details for DOI 10.1109/JLT.2006.884987
View details for Web of Science ID 000243888600060
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Single fiber confocal microscope with a two-axis gimbaled MEMS scanner for cellular imaging
OPTICS EXPRESS
2006; 14 (19): 8604-8612
Abstract
We present a single fiber reflectance confocal microscope with a two dimensional MEMS gimbaled scanner. Achieved lateral and axial resolutions are 0.82 mum and 13 mum, respectively. The field of view is 140 x 100 mum at 8 frames/second. Images and videos of cell phantoms and tissue are presented with sub-cellular resolution.
View details for Web of Science ID 000240638700016
View details for PubMedID 19529240
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Fast-scanning two-photon fluorescence imaging based on a microelectromechanical systems two-dimensional scanning mirror
OPTICS LETTERS
2006; 31 (13): 2018-2020
Abstract
Towards overcoming the size limitations of conventional two-photon fluorescence microscopy, we introduce two-photon imaging based on microelectromechanical systems (MEMS) scanners. Single crystalline silicon scanning mirrors that are 0.75 mm x 0.75 mm in size and driven in two dimensions by microfabricated vertical comb electrostatic actuators can provide optical deflection angles through a range of approximately16 degrees . Using such scanners we demonstrated two-photon microscopy and microendoscopy with fast-axis acquisition rates up to 3.52 kHz.
View details for Web of Science ID 000238494600026
View details for PubMedID 16770418
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High fill-factor two-axis gimbaled tip-tilt-piston micromirror array actuated by self-aligned vertical electrostatic combdrives
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
2006; 15 (3): 563-571
View details for DOI 10.1109/JMEMS.2006.876666
View details for Web of Science ID 000238311000014
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Tunable blazed gratings
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
2006; 15 (3): 597-604
View details for DOI 10.1109/MEMS.2006.872241
View details for Web of Science ID 000238311000018
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Tunable wavelength demultiplexer and OCDMA code hopping using a 10-mu s-tuning MEMS-actuated Gires-Tournois filter
IEEE PHOTONICS TECHNOLOGY LETTERS
2006; 18 (9-12): 1398-1400
View details for DOI 10.1109/LPT.2006.876999
View details for Web of Science ID 000238708300133
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Microoptical characterization of piezoelectric vibratory microinjections in Drosophila embryos for genome-wide RNAi screen
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
2006; 15 (2): 277-286
View details for DOI 10.1109/JMEMS.2006.872242
View details for Web of Science ID 000236770200001
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Air-bridged photonic crystal slabs at visible and near-infrared wavelengths
PHYSICAL REVIEW B
2006; 73 (11)
View details for DOI 10.1103/PhysRevB.73.115126
View details for Web of Science ID 000236467300064
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Automated MEMS-based Drosophila embryo injection system for high-throughput RNAi screens
LAB ON A CHIP
2006; 6 (8): 1012-1019
Abstract
We have developed an automated system based on microelectromechanical systems (MEMS) injectors for reliable mass-injection of Drosophila embryos. Targeted applications are high-throughput RNA interference (RNAi) screens. Our injection needles are made of silicon nitride. The liquid to be injected is stored in an integrated 500 nl reservoir, and an externally applied air pressure pulse precisely controls the injected volume. A steady-state water flow rate per applied pressure of 1.2 nl s(-1) bar(-1) was measured for a needle with channel width, height and length of 6.1 microm, 2.3 microm and 350 microm, respectively. A typical volume of 60 pl per embryo can be reliably and rapidly delivered within tens of milliseconds. Theoretical predictions of flow rates match measured values within +/-10%. Embryos are attached to a glass slide surface and covered with oil. Packages with the injector chip and the embryo slide are mounted on motorized xyz-stages. Two cameras allow the user to quickly align the needle tip to alignment marks on the glass slide. Our system then automatically screens the glass slide for embryos and reliably detects and injects more than 98% of all embryos. Survival rates after deionized (DI) water injection of 80% and higher were achieved. A first RNAi experiment was successfully performed with double-stranded RNA (dsRNA) corresponding to the segment polarity gene armadillo at a concentration of 0.01 microM. Almost 80% of the injected embryos expressed an expected strong loss-of-function phenotype. Our system can replace current manual injection technologies and will support systematic identification of Drosophila gene functions.
View details for DOI 10.1039/b600238b
View details for Web of Science ID 000239313800007
View details for PubMedID 16874371
- Optical MEMS for Light Wave Communication (Invited Paper) Journal of Lightwave Technology 2006; 24 (12): 4433-4454.
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Reconfigurable near-infrared optical filter with a micromechanical diffractive Fresnel lens
IEEE PHOTONICS TECHNOLOGY LETTERS
2005; 17 (12): 2622-2624
View details for DOI 10.1109/LPT.2005.859186
View details for Web of Science ID 000233621000041
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Microoptical characterization and modeling of positioning forces on drosophila embryos self-assembled in two-dimensional arrays
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
2005; 14 (5): 1187-1197
View details for DOI 10.1109/JMEMS.2005.851834
View details for Web of Science ID 000232571000032
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Displacement sensing using evanescent tunneling between guided resonances in photonic crystal slabs
JOURNAL OF APPLIED PHYSICS
2005; 98 (3)
View details for DOI 10.1063/1.1999031
View details for Web of Science ID 000231246100002
- Reconfigurable Near-Infrared Optical Filter with Micromechanical Diffractive Fresnel Lens IEEE Photonics Technology Letters 2005; 17 (12): 2622-2624
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Photonic crystal slabs demonstrating strong broadband suppression of transmission in the presence of disorders
OPTICS LETTERS
2004; 29 (23): 2782-2784
Abstract
We characterize the transmission spectra of out-of-plane, normal-incidence light of two-dimensional silicon photonic crystal slabs and observe excellent agreement between the measured data and finite-difference time-domain simulations over the 1050-1600-nm wavelength range. Crystals that are 340 nm thick and have holes of 330-nm radius on a square lattice of 998-nm pitch show 20-dB extinction in transmission from 1220 to 1255 nm. Increasing the hole radius to 450 nm broadens the extinction band further, and we obtain >85% extinction from 1310 to 1550 nm. Discrepancies between simulation and measurement are ascribed to disorder in the photonic lattice, which is measured through image processing on high-resolution scanning electron micrographs. Analysis of crystal imperfections indicates that they tend to average out narrowband spectral features, while having relatively small effects on broadband features.
View details for Web of Science ID 000225280700028
View details for PubMedID 15605504
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Analysis of resonant frequency of fast scanning micromirror with vertical combdrives
IEICE TRANSACTIONS ON ELECTRONICS
2004; E87C (11): 2006-2008
View details for Web of Science ID 000225210400040
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Lithography process for trench pattern above large cavity to fabricate fast scanning micromirror
IEICE TRANSACTIONS ON ELECTRONICS
2004; E87C (8): 1395-1398
View details for Web of Science ID 000223264700030
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Tunable optical transversal filters based on a Gires-Tournois interferometer with MEMS phase shifters
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
2004; 10 (3): 588-597
View details for DOI 10.1109/JSTQE.2004.828477
View details for Web of Science ID 000223299300022
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Introduction to the issue on optical microsystems
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
2004; 10 (3): 433-434
View details for Web of Science ID 000223299300001
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Micromechanical gratings for visible and near-infrared spectroscopy
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
2004; 10 (3): 604-613
View details for DOI 10.1109/JSTQE.2004.82849
View details for Web of Science ID 000223299300024
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Resonant harmonic response in tapping-mode atomic force microscopy
PHYSICAL REVIEW B
2004; 69 (16)
View details for DOI 10.1103/PhysRevB.69.165416
View details for Web of Science ID 000221427100093
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Snap down voltage of a fast-scanning micromirror with vertical electrostatic combdrives
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS
2004; 43 (2B): L284-L286
View details for Web of Science ID 000220378600016
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Bonding of two silicon layers above a gap to fabricate a fast scanning micromirror
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS
2004; 43 (1A-B): L50-L52
View details for DOI 10.1143/JJAP.43.L50
View details for Web of Science ID 000220092700016
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The torque of high speed scanning micromirrors with vertical combdrives
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS
2003; 42 (12A): L1449-L1451
View details for DOI 10.1143/JJAP.42.L1449
View details for Web of Science ID 000187509800015
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Self-aligned vertical electrostatic combdrives for micromirror actuation
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
2003; 12 (4): 458-464
View details for DOI 10.1109/JMEMS.2003.811728
View details for Web of Science ID 000184649700007
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Optical wavelength filtering by diffraction from a surface relief (vol 28, pg 447, 2003)
OPTICS LETTERS
2003; 28 (12): 1055-1055
View details for Web of Science ID 000183362700031
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Displacement-sensitive photonic crystal structures based on guided resonance in photonic crystal slabs
APPLIED PHYSICS LETTERS
2003; 82 (13): 1999-2001
View details for DOI 10.1063/1.1563739
View details for Web of Science ID 000181801100001
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Optical wavelength filtering by diffraction from a surface relief
OPTICS LETTERS
2003; 28 (6): 447-449
Abstract
We present an analytical solution to the problem of finding a diffractive surface relief that generates a specific optical amplitude and phase spectral reflection in a particular direction. We show that any discrete finite impulse response filter can be generated to within a multiplicative constant at nonzero frequencies. We propose an implementation of such a filter that works in the visible and the near infrared, based on a two-dimensional array of dual-state tiltable mirrors. A 1024 x 1024 array results in a 1024-tap filter with 10-bit quantization of the impulse response. The applications of such a device include spectroscopy and wavelength-division multiplex switching.
View details for Web of Science ID 000181411300023
View details for PubMedID 12659275
- MEMS optical wavelength deinterleaver with continuously variable channel spacing and center wavelength IEEE Photonics Technology Letters 2003; 15 (3): 425-427
- Optical Microphone Based on a Modulated Diffractive Lens IEEE Photonics Technology Letters 2003; 15 (10): 1431-1433
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Optical characterization of high speed scanning micromirrors with vertical combdrives
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS
2002; 41 (10B): L1169-L1171
View details for DOI 10.1143/JJAP.41.L1169
View details for Web of Science ID 000179893900014
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Process for high speed micro electromechanical systems (MEMS) scanning mirrors with vertical comb drives
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS
2002; 41 (8A): L899-L901
View details for DOI 10.1143/JJAP.41.L899
View details for Web of Science ID 000177527400012
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Coherent micromirror arrays
OPTICS LETTERS
2002; 27 (5): 366-368
Abstract
A one-dimensional, spatial light phase modulator consists of a coherent array of programmable micromirrors. Each micromirror has rotation as well as elevation control to permit high-fidelity, piecewise linear approximations to a desired spatial phase profile. We demonstrate programmable, coherent spatial modulation by configuring a four-micromirror array to act as a blazed diffraction grating, showing five diffraction orders. In sharp contrast, adjustment of each mirror elevation converts the grating into the equivalent of a single, large tilted mirror that reflects only in a new specular direction. Higher-order diffraction is effectively suppressed.
View details for Web of Science ID 000174143400028
View details for PubMedID 18007805
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Introduction to the issue on optical MEMS
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
2002; 8 (1): 1-3
View details for Web of Science ID 000174519300001
- Dual mode micromirrors for optical phased array applications Sensors and Actuators: A. Physical 2002; A97-98: 21-26
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Narrow-band light emission in semiconductor-fibre asymmetric waveguide coupler
ELECTRONICS LETTERS
2000; 36 (16): 1378-1379
View details for Web of Science ID 000088762800031
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Scalable optical cross-connect switch using micromachined mirrors
IEEE PHOTONICS TECHNOLOGY LETTERS
2000; 12 (7): 882-884
View details for Web of Science ID 000088505800042
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Wavelength-selective semiconductor in-line fibre photodetectors
ELECTRONICS LETTERS
2000; 36 (6): 515-516
View details for Web of Science ID 000086381000023
- A raster-scanning full-motion video display using polysilicon micromachined mirrors Sensors & Actuators A 2000; 83 (1-3): 291-296
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GaAs AlGaAs multiple-quantum-well in-line fiber intensity modulator
APPLIED PHYSICS LETTERS
1999; 75 (3): 310-312
View details for Web of Science ID 000081409000002
- Electrostatic Combdrive-Actuated Micromirrors for Laser-Beam Scanning and Positioning IEEE Journal of MicroElectroMechanical Systems (JMEMS) 1998; 7 (1): 27-37
- Compact 2D laser beam scanner with fan laser array and Si micromachined microscanner Electronics Letters (UK), IEE 1997; 33 (13): 1143-5
- Silicon-micromachined micromirrors with integrated high-precision actuators for external-cavity semiconductor lasers IEEEPhotonics Techn. Letters 1996; 8 (1): 95-97
- Linear Microvibromotor for Positioning Optical Components IEEE Journal of MicroElectroMechanical Systems (JMEMS) 1996; 5 (3): 159-165
- Surface-Micromachined Mirrors for Laser-Beam Positioning Sensors and Actuators A (Physical) 1996; A52 (13): 76-80
- Laser-to-fiber Coupling Module Using a Micromachined Alignment Mirror IEEE Photonics Technology Letters 1996; 8 (3): 396-398
- Optical Transmission of Narrowband Millimeter-Wave Signals IEEE Transactions on Microwave Theory and Techniques 1995; 43 (9): 2229-2240
- Optoelectronic packaging using silicon surface-micromachined alignment mirrors IEEEPhotonics Techn. Letters 1995; 7 (1): 41-43
- Stable Picosecond Pulse Generation at 46 GHz by Mode-Locking of a Semiconductor Laser Operating in an Optoelectronic Phase-Locked Loop Electronics Letters 1994; 30 (1): 69-71
- Transmission of 300 Mb/s BPSK at 39 GHz Using Feedforward Optical Modulation Electronics Letters 1994; 30 (2): 160-161
- Optical Feedback Stabilization of the Intensity Oscillations in Ultra-high Frequency, Passively Modelocked, Monolithic, Quantum Well Lasers Photonics Techn. Lett. 1993; 5 (11): 1264-1267
- Pulse buildup in passively mode-locked quantum-well semiconductor lasers Applied Physics Letters 1993; 15 (63): 2021-2023
- Millimeter-Wave Frequency, Multi-Gigahertz Optical Modulation by Feedforward Phase Noise Compensation of a Beat Note Generated by Photomixing of Two Laser Diodes IEEEPhotonics Techn. Letters 1993; 5 (5): 574-577
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HIGH-FREQUENCY ATTENUATED TOTAL INTERNAL-REFLECTION LIGHT-MODULATOR
APPLIED PHYSICS LETTERS
1992; 61 (21): 2500-2502
View details for Web of Science ID A1992JZ02500002
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DEFORMABLE GRATING OPTICAL MODULATOR
OPTICS LETTERS
1992; 17 (9): 688-690
Abstract
A new type of light modulator, the deformable grating modulator, based on electrically controlling the amplitude of a micromachined phase grating is described. Mechanical motion of one quarter of a wavelength is sufficient for switching in this device. The small mechanical motion allows the use of structures with high mechanical resonance frequencies. We have developed a deformable grating modulator with a bandwidth of 1.8 MHz and a switching voltage of 3.2 V and have demonstrated modulation with 16 dB of contrast. Smaller devices with bandwidths of as much as 6.1 MHz and predicted switching voltages of less than 10 V were also fabricated.
View details for Web of Science ID A1992HP32800020
View details for PubMedID 19794599
- A deformable grating optical modulator Optics Letters 1992; 17 (9): 688-690
- An Attenuated Internal Reflection Modulator Applied Physics Letters 1992; 21 (61): 2500-2502
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ALL-SILICON INTEGRATED OPTICAL MODULATOR
IEEE JOURNAL ON SELECTED AREAS IN COMMUNICATIONS
1991; 9 (5): 704-710
View details for Web of Science ID A1991FW03000011
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PIGTAILED SINGLE-MODE FIBER OPTIC LIGHT-MODULATOR IN SILICON
IEEE PHOTONICS TECHNOLOGY LETTERS
1990; 2 (9): 640-642
View details for Web of Science ID A1990EB35300012
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A POLARIZATION-INDEPENDENT SILICON LIGHT-INTENSITY MODULATOR FOR 1.32-MU-M FIBER OPTICS
IEEE PHOTONICS TECHNOLOGY LETTERS
1990; 2 (4): 262-264
View details for Web of Science ID A1990CX91400013
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ALL-SILICON INTEGRATED OPTICAL MODULATOR FOR 1.3-MU-M FIBER-OPTIC INTERCONNECTS
APPLIED PHYSICS LETTERS
1989; 55 (4): 349-350
View details for Web of Science ID A1989AG24200009
Books and Book Chapters
- Time-Resolved Tapping-Mode Atomic Force Microscopy Scanning Probe Microscopy in Nanoscience and Nanotechnology 2 Springer Verlag. 2011: 1
- Higher harmonics and time-varying force detection in dynamic force microscopy Handbook of Nanotechnology Springer Verlag. 2009; 3: 1
- Micro and Nano Electromechanical Systems National Nanotechnology Infrastructure Network (NNIN) Open Textbook on Nanotechnology (33 pages), http://www.nano.umn.edu/nnin_opentext/contents.jsp 2008: 1
- Microelectromechanical Systems for Lightwave Communication Optical Fiber Telecommunications, A: Components and Subsystems edited by Kaminow, I., P., Li, T., Willner, A., E. Academic Press. 2008: 713-758
- Photonic Microsystems - Micro and Nanotechnology Applied to Optical Devices and Systems Springer Verlag. 2008
- Higher-Harmonic Force Detection in Dynamic Force Microscopy Handbook of Nanotechnology Springer Verlag. 2006; 2: 717-736
- Vertical Combdrives - Design and Implementation MEMS/NEMS Handbook Springer-Verlag New York Inc.. 2005: 393-420
Conference Proceedings
- Single nano-particle sensing exploiting crossed polarizers to improve the signal-to-noise ratio 2013
- High-Reflectivity, Broadband Monolithic Silicon Photonic Crystal Mirrors on Two-Axis MEMS Scanner by Transfer-Printing 2013
- Monolithic Photonic Crystal-Based Fiber-TipFabry-Pérot Static Pressure Sensor 2013
- Double-layer silicon waveguides in standard silicon for 3D photonics 2013
- OvercomingMultimodal Effects in Optical Fiber Tip CMOS-Compatible Fabry-Perot Sensors 2012
- Ratiometric Molecular Microscopy: Towards Real-Time Quantitative Delineation of Brain Tumor Margins 2012
- Multifunctional Fiber Sensors Based on Photonic Crystals 2012
- Integrated Silicon Photonic Temperature Sensors Based onBragg Reflectors with Asymmetric Fano Lineshapes 2012
- Optical imaging system designed for biomolecule detection using photonic crystal membranes 2012
- Asymmetric Fano Lineshapes in Integrated Silicon Bragg Reflectors 2012
- Double-Layer Silicon Photonic Crystal Fiber Tip Temperature Sensor 2012
- 9.6mm diameter femtosecond laser microsurgeryprobe 2012
- 3-D MEMS Scanning System For Dual-Axis Confocal Microendoscopy 2011
- Fabry-Perot Fiber Sensors with Reproducible Displacement Sensitivities 2011
- Spot Formation and Scanning Microscopy via Multimode Fibers 2011
- Frontside-only processing of 2-D MEMS scanner for miniature dual-axis confocal microendoscopes 2011
- Double-Layer Silicon Photonic Crystal Fiber Tip Sensor 2011
- Interdigitated Annular CMUT Arrays for Ultrasound Assisted Delivery of Fluorescent Contrast Agents 2011
- AGILE: Axially Graded Index LEns as a non-tracking solar concentrator 2011
- Cortial blood flow imaging with a portable MEMS based2-photon fluorescence microendoscope 2011
- A surgical confocal microscope utilizing a MEMS scanner and a GRIN relay lens for molecular image-guided brain tumor resection 2010
- Photonic Crystal Mirrors for Free-Space Communication and Fiber-Optic Sensors 2010
- Quasi-Passive and Reconfigurable Node for Optical Access Network 2010
- From Bench to Bedside with AdvancedDual-Axes Confocal Microendoscope 2010
- Miniature optical-sectioning microscopy for molecular image guidance during brain tumor resection 2010
- High Temperature Photonic Crystal Fiber Tip Sensor 2010
- From Bench to Bedside with AdvancedDual-Axes Confocal Microendoscope 2010
- High-Sensitivity Thermally Stable Acoustic Fiber Sensor 2010
- SurgicalDual-Axis Confocal Microscope for Brain Tumor Resection 2010
- Monolithic Silicon Photonic Crystal Fiber Tip Sensor forRefractive Index and Temperature Sensing 2010
- A CMOS Compatible Low Temperature Process for Photonic CrystalMEMS Scanner 2009
- Optomechanical fiber gyroscope 2009
- Photonic Crystal Fiber Tip Sensorfor Precision Temperature Sensing 2009
- In vivo Clinical and Intravital Imaging with MEMS Based Dual-Axes Confocal Microscopes 2009
- Tunable Optical Bandpass Filter with High-Quality Vertical MirrorsMicroassembled on Movable MEMS Platforms 2009
- Sequential in vivo Molecular Imaging with a Dual-Axes Confocal Microscope 2009
- Monolithic Silicon Photonic Crystal Slab Fiber Tip Sensor 2009
- Interferometric Force Sensing AFM Probes ForNanomechanical Mapping of Material Properties 2009
- Fiber-Optical Acoustic Sensor Based on a Photonic-Crystal Diaphragm 2009
- Three-dimensional in-vivo imaging with a miniature dual-axes confocal fluorescence microscope 2008
- Double-layered Monolithic Silicon Photonic Crystals 2008
- Large-Area Monolithic Photonic Crystal Mirrors with High Reflectivity in the 1250-1650nm Band Patterned by Optical Lithography 2008
- Displacement sensing with a mechanically tunable photonic crystal 2008
- Monolithic photonic crystals 2008
- Two-Photon Luminescence Imaging Using a MEMS-Based Miniaturized Probe 2008
- Interface Quality Control of Monolithic Photonic Crystals by Hydrogen Annealing 2008
- MEMS based Dual-Axes Confocal Clinical Endoscope for Real Time in vivo Imaging 2008
- In vivo Intravital Imaging with a Dual-Axes Confocal Microscope in Skin 2008
- Large-Area High-Reflectivity Broadband Monolithic Silicon Photonic Crystal Mirror MEMS Scanner 2008
- Photonic-crystal-diaphragm-based fiber-tip hydrophone optimized for ocean acoustics 2008
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External fibre Fabry-Perot acoustic sensor based on a photonic-crystal mirror
IOP PUBLISHING LTD. 2007: 3049-3054
View details for DOI 10.1088/0957-0233/18/10/S01
View details for Web of Science ID 000249982100002
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Portable forms of fiber-optic one- and two-photon fluorescence microendoseopy towards imaging in freely moving mice
CELL PRESS. 2007: 154A-154A
View details for Web of Science ID 000243972400714
- Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope (invited talk) 2007
- Three-Dimensional in vivo Reflectance and Fluorescence Imaging by a Handheld Dual-Axes Confocal Microscope 2007
- A compact 15-mm wide two-photon microscope for imaging and femtosecond laser microsurgery 2007
- A Portable Two-photon Fluorescence Microendoscope Based on a Two-dimensional Scanning Mirror 2007
- Vortex Generation and Pixel Calibration Using a Spatial Light Modulators for Maskless Lithography 2007
- Large-Stroke Self-Aligned Vertical Comb Drive Actuated Micromirror Arrays for Adaptive Optics Applications 2007
- Compact optical design for a dual-axes confocal endoscopic microscope 2007
- Three-Dimensional In Vivo Real Time Imaging By A Miniature Dual-Axes Confocal Microscope Based on a Two-Dimensional MEMS Scanner 2007
- High Reflectivity Broadband Photonic Crystal Mirror MEMS Scanner 2007
- MEMS Based Dual-axes Confocal Microscope for in-vivo Imaging 2007
- An External Cavity Tunable Laser with a Low-Loss Narrowband MEMS Tunable Blazed Grating 2007
- Displacement Sensing with a Mechanically Tunable Photonic Crystal 2007
- Optical Bandpass Filter with Tunable Chromatic Dispersion and Optical Bandwidth Using a Variable MEMS Reflector 2007
- Single-film Broadband Photonic Crystal Micro-mirror with Large Angular Range and Low Polarization Dependence 2007
- Pull-in Analysis of Scanners Actuated by Electrostatic Vertical Combdrives 2007
- Toward portable two-photon fluorescence micro-endoscopy using a two-dimensional microelectromechanical (MEMS) scanning mirror 2007
- Monolithic Photonic Crystals 2007
- Optical MEMS Based on High-Reflectivity Photonic Crystals 2007
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Micromachined bubble-jet cell sorter with multiple operation modes
ELSEVIER SCIENCE SA. 2006: 523-529
View details for DOI 10.1016/j.snb.2006.05.011
View details for Web of Science ID 000239876900029
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Micromachined Fourier transform spectrometer on silicon optical bench platform
ELSEVIER SCIENCE SA. 2006: 523-530
View details for DOI 10.1016/j.sna.2005.12.022
View details for Web of Science ID 000239295000072
- High Capacity Optical Packet Switch Based on a Waveguide Grating Router Operated over Multiple FSRs 2006
- Superresolution Image Enhancement in Digital Photomicrography by Subpixel Translation using a Scanning Micromirror 2006
- Micromechanical Diffractive Optical Filters for Spectroscopy 2006
- Single-Crystal-Silicon Continuous Membrane Deformable Mirror Array for Adaptive Optics 2006
- Micromirror-based scan range enhancement in Fourier-domain optical coherence tomography 2006
- Spatial Light Modulators for Maskless Lithography 2006
- Dual quarter-wave retardation based polarization beam splitting in photonic crystal slabs 2006
- Dual-Axes Confocal Fluorescence Microscopy with a Two-Dimensional MEMS Scanner 2006
- Single Fiber Confocal Microscope Using a Two-Axis Microscanner for Cellular Imaging 2006
- Coupled Torsional Cantilevers for label-free single-molecule bio-detection and nanomaterials characterization 2006
- High-sensitivity interferometric schemes for ML2 micromirror calibrations 2006
- Large-Stroke Self-Aligned Vertical Comb Drive Actuators for Adaptive Optics Applications 2006
- Compact Laser Scanning Distance Sensor with a Two-axis Gimbaled Microscanner for Volumetric Imaging 2006
- Fast-scanning Two-photon Fluorescence Imaging Using a Microelectromechanical Systems (MEMS) Two-dimensional Scanning Mirror 2006
- Photonic Crystals as Angle-Insensitive Broadband Mirrors 2006
- A reconfigurable optical demultiplexer based on a MEMS deformable blazed grating 2006
- MEMS Based Dual-axes Confocal Reflectance Handheld Microscope for in vivo Imaging 2006
- External Fiber Fabry-Perot Acoustic Sensor Based on Photonic Crystal Mirror 2006
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Effects of through-focus symmetry in maskless lithography using micromirror arrays
A V S AMER INST PHYSICS. 2005: 2738-2742
View details for DOI 10.1116/1.2062407
View details for Web of Science ID 000234613200088
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Micro-optical characterization of fluidic self-assembly of Drosophila embryos through surface tension: Principle, simulation and experiments
OPTICAL SOC JAPAN. 2005: 352-357
View details for Web of Science ID 000232089300016
- Near-Field Sensor Using Photonic Crystal Slabs 2005
- Excitation of Non-Degenerate Resonances through Breaking of Mirror Symmetry in Photonic Crystal Slabs 2005
- Design and Operation of a Micromachined Bubble-Jet Cell Sorter 2005
- Silicon Masking Layers for Fabrication of High Aspect Ratio MEMS 2005
- A Micro-Mechanical Fresnel Lens for Spectral Filtering 2005
- A wavelength selective switch with flat passband using a free-space grating and MEMS phase-shifters 2005
- Micromachined Fourier Transform Spectrometer on Silicon Optical Bench Platform 2005
- High-resolution microelectromechanical scanners for miniaturized dual-axes confocal microscopes 2005
- Understanding Through-Focus Symmetry in Maskless Lithography Using Micromirror Arrays 2005
- Scalable optical switch fabric for avionic networks 2005
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Characterization of fluidic microassembly for immobilization and positioning of Drosophila embryos in 2-D arrays
ELSEVIER SCIENCE SA. 2004: 191-196
View details for DOI 10.1016/j.sna.2003.11.021
View details for Web of Science ID 000223704800010
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Design and operation of a microfluidic sorter for Drosophila embryos
ELSEVIER SCIENCE SA. 2004: 59-66
View details for DOI 10.1016/j.snu.2003.10.015
View details for Web of Science ID 000223969400009
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High-resolution imaging of elastic properties using harmonic cantilevers
ELSEVIER SCIENCE SA. 2004: 183-190
View details for DOI 10.1016/j.sna.2003.11.031
View details for Web of Science ID 000223704800009
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Single-crystalline silicon micromirrors actuated by self-aligned vertical electrostatic combdrives with piston-motion and rotation capability
ELSEVIER SCIENCE SA. 2004: 423-428
View details for DOI 10.1016/j.sna.2003.11.024
View details for Web of Science ID 000223704800041
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Fabrication method for elastomer spatial light modulators for short wavelength maskless lithography
ELSEVIER SCIENCE SA. 2004: 528-535
View details for DOI 10.1016/j.sna.2003.12.001
View details for Web of Science ID 000223704800057
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Micromachined silicon force sensor based on diffractive optical encoders for characterization of microinjection
ELSEVIER SCIENCE SA. 2004: 197-203
View details for DOI 10.1016/j.sna.2003.11.028
View details for Web of Science ID 000223704800011
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Angular and polarization properties of a photonic crystal slab mirror
OPTICAL SOC AMER. 2004: 1575-1582
Abstract
It was recently demonstrated that a photonic crystal slab can function as a mirror for externally incident light along a normal direction with near-complete reflectivity over a broad wavelength range. We analyze the angular and polarization properties of such photonic crystal slab mirror, and show such reflectivity occurs over a sizable angular range for both polarizations. We also show that such mirror can be designed to reflect one polarization completely, while allowing 100% transmission for the other polarization, thus behaving as a polarization splitter with a complete contrast. The theoretical analysis is validated by comparing with experimental measurements.
View details for Web of Science ID 000220908100012
View details for PubMedID 19474983
- Automated MEMS Based Fruit Fly Embryo Injection System for Genome-Wide High-Throughput RNAi Screens 2004
- Micro-Optical Characterization and Modeling of Microfluidic Self-Assembly in Biology 2004
- Interference-Based Optical MEMS Filters 2004
- Tunable external cavity laser with a stationary deformable MEMS grating. 2004
- Ultrasonic Microinjection Characterized by Integrated Micro-optical Force Encoder 2004
- Variable Bandwidth Optical Filters with Vertical Micromirrors and Silicon Optical Bench Alignment Technology 2004
- A 10-ms-tuning MEMS-Actuated Gires-Tournois Filter for use as a Tunable Wavelength Demultiplexer and a TunableOCDMA Encoder/Decoder 2004
- Micromachined Silicon Diffractive Optical Force Encoders: Principles and Applications in Biology 2004
- Vertical micromirror fabricated in (110) silicon device layer by combination of KOH and DRIE etch 2004
- A Transmissive Interferometric Light Modulator based on Silicon Nitride Double-Half-Wave Filter Structure 2004
- Two-Axis Gimbaled Microscanner in Double SOI Layers Actuated by Self-Aligned Vertical Electrostatic Combdrive 2004
- Surface Micromachined Elastomer Spatial Light modulators for Extreme Ultra violet Radiation 2004
- High Fill-Factor Two-Axis Gimbaled Tip-Tilt-Piston Micromirror Array Actuated by Self-Aligned Vertical Electrostatic Combdrives 2004
- Tunable Optical Wavelength Deinterleaver based on Tunable MEMS Blazed Gratings 2004
- Mechanically switchable photonic crystal structures based on coupled photonic crystal slabs 2004
- Two-Dimensional Photonic Crystals at Visible Wavelengths 2004
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Scaling Internet routers using optics
ASSOC COMPUTING MACHINERY. 2003: 189-200
View details for Web of Science ID 000188215800017
- Programmable Optical Wavelength Filter Based on Diffraction from a 2‑D MEMS Micromirror Array 2003
- Integrated Optical Diffractive Micrograting-Based Injection Force Sensor 2003
- High-Precision Characterization of Embryo Positioning Force Using MEMS Optical Encoder 2003
- Tunable Wavelength Multiplexer/Demultiplexer using a MEMS Gires-Tournois Interferometer 2003
- Harmonic Cantilevers for Nanomechanical Sensing of Elastic Properties 2003
- Elastomer Spatial Light Modulators for Extreme Ultraviolet Lithography 2003
- Microoptical phased arrays for spatial and spectral switching 2003
- Characterization of Drosophila Embryos Immobilized by Fluidic Microassembly 2003
- Tunable bandwidth optical filter based on MEMS Gires‑Tournois Interferometer 2003
- Optical MEMS - Fabrication, Scaling and Design of Microoptical Devices and Systems 2003
- MOEMS Spatial Light Modulator Development at the Center for Adaptive Optics 2003
- Microfluidic Switch for Embryo and Cell Sorting 2003
- Configurable spectral filter with an array of diffraction gratings 2003
- Femtosecond Direct Space-to-Time Pulse Shaping with MEMS Micromirror Arrays 2003
- High-Resolution, High-Speed Microscanner in Single-Crystalline Silicon Actuated by Self-Aligned Dual-Mode Vertical Electrostatic Combdrive with Capability for Phased Array Operation 2003
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Dual-mode micromirrors for optical phased array applications
ELSEVIER SCIENCE SA. 2002: 21-26
View details for Web of Science ID 000176297000004
- High Speed MEMS Scanning Mirror with Vertical Comb Drive 2002
- Microoptical phased arrays for spatial and spectral switching 2002
- Positioning and Immobilization of Drosophila Embryos in 2‑D Arrays for Drug Injection 2002
- Segmented Deformable Micromirror for Free-Space Optical Communication 2002
- Micromachined Hollow Needle with Integrated Pressure Sensor for Precise, Calibrated Injection into Cells and Embryos 2002
- Dynamic Diffractive Optical Elements based on MEMS Technology 2002
- Micromirror Array Phase Modulator for Ultrashort Optical Pulse Shaping 2002
- Optical Communication with Coherent MEMS Arrays 2002
- Tunable Chromatic Dispersion Compensators Using MEMS Gires-Tournois Interferometers 2002
- MEMS Switchable WDM De interleaver Based on a Gires-Tournois Interferometer 2001
- Effects of Mirror Surface Deformation in Optical Delay Lines Based on Resonant-Scanning Micromirrors 2001
- Phased Arrays of Micromirrors for Programmable Shaping of Ultrashort Pulses 2001
- Self-Aligned Vertical Combdrive Actuators for Optical Scanning Micromirrors 2001
- Dual Mode Micromirrors for Optical Phased Arrays Applications 2001
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Free space communication link using a grating light modulator
ELSEVIER SCIENCE SA. 2000: 6-10
View details for Web of Science ID 000087144800002
- Low Power Wireless Readout of Autonomous Sensor Wafer using MEMS Grating Light Modulator 2000
- Micro-electro- mechanical systems spatial light modulator development 2000
- Surface-micromachined mirrors for scalable fiber optic switching applications 2000
- Compact Optical Delay Line Based on Scanning Surface Micromachined Polysilicon Micromirrors 2000
- Miniature variable optical delay using silicon micromachined scanning mirrors 2000
- Micromachined grating light modulators for wireless sensor networks 1999
- A Raster-Scanning Full-Motion Video Display Using Polysilicon Micromachined Mirrors 1999
- Micromachined Scalable Fiber-Optic Switch 1999
- Scalable Fiber Optic Switch Using Micromachined Mirrors 1999
- Static and Dynamic Characterization of Polysilicon Surface-Micromachined Actuators 1999
- A GaAs/AlGaAs narrow bandwidth in-line fiber filter 1999
- Free-Space Communication Link Using a Grating Light Modulator 1999
- Robustness and Reliability of Micromachined Scanning Mirrors 1999
- Integrated Micromachined Scanning Display Systems 1999
- In-line fiber-optic filter using GaAs ARROW waveguide 1998
- Micromachined Mirrors in a Raster Scanning Display System 1998
- Polysilicon optical microscanners for laser scanning displays 1998
- Micromachined microscanners for optical scanning 1997
- High-Resolution Silicon Surface Micromachined Displays 1997
- Actuated Polysilicon Micromirrors for Raster-Scanning Displays 1997
- Design and Fabrication of High-Performance Silicon Micromachined Resonant Microscanners for Optical Scanning Applications 1996
- Surface-micromachined electrostatic-comb driven scanning micromirrors for barcode scanners 1996
- Actuated Micromachined Microreflector with Two Degrees of Freedom for Integrated Optical Systems 1996
- High-Precision Silicon Micromachined Micromirrors for Laser Beam Scanning and Positioning 1996
- Actuation of polysilicon surface-micromachined mirrors 1996
- Linear Vibromotor-Actuated Micromachined microreflector for Integrated Optical Systems 1996
- High-precision Si-micromachined micromirrors with on-chip actuation for external cavity semiconductor lasers 1995
- Surface-micromachined active optical bench for optoelectronic integration and packaging 1995
- Linear Microvibromotor for Positioning Optical Elements 1995
- Precision and performance of polysilicon micromirrors for hybrid integrated optics 1995
- Polysilicon-micromachined optical devices 1995
- Surface-micromachined mirrors for laser-beam positioning 1995
- Integrated Laser to Fiber Coupling Module Using a Micromachined Alignment Mirror 1995
- High Data Rate Millimeter Wave Subcarrier Transmission Using Feedforward Optical Modulation 1994
- Impact-actuated linear microvibromotor for micro- optical systems on silicon 1994
- Stable Picosecond Pulse Generation at 46 GHz by Passive Mode-Locking of a Semiconductor Laser Operating in an Optoelectronic Phase-Locked Loop 1994
- Micromachined alignment mirrors for opto-electronic packaging 1994
- Millimeter wave optical transmission using a tunable laser beatnote source with feedforward compensation 1993
- Dynamics of pulse build-up in QW lasers passively mode-locked at millimeter wave frequencies 1993
- Deformable grating optical modulator 1992
- High Speed Attenuated Internal reflection Modulators 1991
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A SMALL-AREA LIGHT-INTENSITY MODULATOR IMPLEMENTED IN SILICON
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC. 1989: 2614-2614
View details for Web of Science ID A1989AW89000071
- Bulk piezoresistors for stable pressure sensors 1986