Bio

Kenny's group is researching fundamental issues and applications of micromechanical structures. These devices are usually fabricated from silicon wafers using integrated circuit fabrication tools. Using these techniques, the group builds sensitive accelerometers, infrared detectors, and force-sensing cantilevers. This research has many applications, including integrated packaging, inertial navigation, fundamental force measurements, experiments on bio-molecules, device cooling, bio-analytical instruments, and small robots. Because this research field is multidisciplinary in nature, work in this group is characterized by strong collaborations with other departments, as well as with local industry.

Academic Appointments

Honors & Awards

  • General Chair, Transducers 2015 (2015)
  • Technical Achievement Award, IEEE (2011)
  • Program Manager, DARPA Microsystems Technology Office (2006-2010)
  • Captain, Ultimate Frisbee Coed World Champions (RFBF) (1999)
  • Captain, Ultimate Frisbee Coed National Champions (RFBF) (1998)
  • Terman Fellowship, Stanford University (1995-1998)
  • Robert Bosch Faculty Scholar, Robert Bosch Foundation (1995-1999)
  • CAREER Award, NSF (1995-1999)

Boards, Advisory Committees, Professional Organizations

  • Board of Directors, SiTime Corporation (2004 - Present)

Professional Education

  • PhD, UC Berkeley, Physics (1989)

Patents

  • Daniel J. Lenehan, Kenneth Goodson, Thomas W. Kenny, Mark Munch, Saroj Sahu. "United States Patent 8,602,292 Pump and Fan Control Concepts in a Cooling System", Cooligy, Inc, Dec 10, 2013
  • Thomas Kenny, Mark Munch, Peng Zhou, James Gill Shook, Kenneth Goodson, Dave Corbin, Mark McMaster, James Lovette. "United States Patent US 8,464,781 Cooling Systems Incorporating Heat Exchangers and Thermoelectric Layers", Cooligy, Inc, Jul 18, 2013
  • Robert J. Full, Ronald S. Fearing, Thomas W. Kenny, Kellar Autumn. "United States Patent US 6,737,160 Adhesive Microstructure and Method of Forming Same", The Regents Of The University Of California, May 18, 0004

Contact

Links

2014-15 Courses

Journal Articles

  • Stability of Silicon Microelectromechanical Systems Resonant Thermometers IEEE SENSORS JOURNAL Ng, E. J., Lee, H. K., Ahn, C. H., Melamud, R., Kenny, T. W. 2013; 13 (3)

    View details for DOI 10.1109/JSEN.2012.2227708

    View details for Web of Science ID 000314690100011

  • Topology Optimization of Stressed Capacitive RF MEMS Switches JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Philippine, M. A., Sigmund, O., Rebeiz, G. M., Kenny, T. W. 2013; 22 (1): 206-215

    View details for DOI 10.1109/JMEMS.2012.2224640

    View details for Web of Science ID 000314726900028

  • Bidirectionally tuning Kapitza conductance through the inclusion of substitutional impurities JOURNAL OF APPLIED PHYSICS Duda, J. C., English, T. S., Piekos, E. S., Beechem, T. E., Kenny, T. W., Hopkins, P. E. 2012; 112 (7)

    View details for DOI 10.1063/1.4757941

    View details for Web of Science ID 000310489400041

  • Phase and thickness dependent modulus of Ge2Sb2Te5 films down to 25 nm thickness APPLIED PHYSICS LETTERS Won, Y., Lee, J., Asheghi, M., Kenny, T. W., Goodson, K. E. 2012; 100 (16)

    View details for DOI 10.1063/1.3699227

    View details for Web of Science ID 000303128500018

  • Electrical and Thermal Conduction in Atomic Layer Deposition Nanobridges Down to 7 nm Thickness NANO LETTERS Yoneoka, S., Lee, J., Liger, M., Yama, G., Kodama, T., Gunji, M., Provine, J., Howe, R. T., Goodson, K. E., Kennyt, T. W. 2012; 12 (2): 683-686

    Abstract

    While the literature is rich with data for the electrical behavior of nanotransistors based on semiconductor nanowires and carbon nanotubes, few data are available for ultrascaled metal interconnects that will be demanded by these devices. Atomic layer deposition (ALD), which uses a sequence of self-limiting surface reactions to achieve high-quality nanolayers, provides an unique opportunity to study the limits of electrical and thermal conduction in metal interconnects. This work measures and interprets the electrical and thermal conductivities of free-standing platinum films of thickness 7.3, 9.8, and 12.1 nm in the temperature range from 50 to 320 K. Conductivity data for the 7.3 nm bridge are reduced by 77.8% (electrical) and 66.3% (thermal) compared to bulk values due to electron scattering at material and grain boundaries. The measurement results indicate that the contribution of phonon conduction is significant in the total thermal conductivity of the ALD films.

    View details for DOI 10.1021/nl203548w

    View details for Web of Science ID 000299967800026

    View details for PubMedID 22224582

  • Mechanical characterization of aligned multi-walled carbon nanotube films using microfabricated resonators CARBON Won, Y., Gao, Y., Panzer, M. A., Dogbe, S., Pan, L., Kenny, T. W., Goodson, K. E. 2012; 50 (2): 347-355

    View details for DOI 10.1016/j.carbon.2011.08.009

    View details for Web of Science ID 000297397700001

  • Electrostatic Tuning to Achieve Higher Stability Microelectromechanical Composite Resonators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Lee, H. K., Melamud, R., Kim, B., Hopcroft, M. A., Salvia, J. C., Kenny, T. W. 2011; 20 (6): 1355-1365

    View details for DOI 10.1109/JMEMS.2011.2168083

    View details for Web of Science ID 000297589200016

  • Stable Operation of MEMS Oscillators Far Above the Critical Vibration Amplitude in the Nonlinear Regime JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Lee, H. K., Melamud, R., Chandorkar, S., Salvia, J., Yoneoka, S., Kenny, T. W. 2011; 20 (6): 1228-1230

    View details for DOI 10.1109/JMEMS.2011.2170821

    View details for Web of Science ID 000297589200002

  • Influence of the temperature dependent nonlinearities on the performance of micromechanical resonators APPLIED PHYSICS LETTERS Lee, H. K., Kim, B., Melamud, R., Hopcroft, M. A., Salvia, J. C., Kenny, T. W. 2011; 99 (19)

    View details for DOI 10.1063/1.3660235

    View details for Web of Science ID 000297030200082

  • Orientation angle and the adhesion of single gecko setae JOURNAL OF THE ROYAL SOCIETY INTERFACE Hill, G. C., Soto, D. R., Peattie, A. M., Full, R. J., Kenny, T. W. 2011; 8 (60): 926-933

    Abstract

    We investigated the effects of orientation angle on the adhesion of single gecko setae using dual-axis microelectromechanical systems force sensors to simultaneously detect normal and shear force components. Adhesion was highly sensitive to the pitch angle between the substrate and the seta's stalk. Maximum lateral adhesive force was observed with the stalk parallel to the substrate, and adhesion decreased smoothly with increasing pitch. The roll orientation angle only needed to be roughly correct with the spatular tuft of the seta oriented grossly towards the substrate for high adhesion. Also, detailed measurements were made to control for the effect of normal preload forces. Higher normal preload forces caused modest enhancement of the observed lateral adhesive force, provided that adequate contact was made between the seta and the substrate. These results should be useful in the design and manufacture of gecko-inspired synthetic adhesives with anisotropic properties, an area of substantial recent research efforts.

    View details for DOI 10.1098/rsif.2010.0720

    View details for Web of Science ID 000290898500002

    View details for PubMedID 21288955

  • AC Polarization for Charge-Drift Elimination in Resonant Electrostatic MEMS and Oscillators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Bahl, G., Salvia, J. C., Melamud, R., Kim, B., Howe, R. T., Kenny, T. W. 2011; 20 (2): 355-364

    View details for DOI 10.1109/JMEMS.2010.2100027

    View details for Web of Science ID 000289205400002

  • Wafer-Level Epitaxial Silicon Packaging for Out-of-Plane RF MEMS Resonators with Integrated Actuation Electrodes IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY Chen, K., Wang, S., Salvia, J. C., Melamud, R., Howe, R. T., Kenny, T. W. 2011; 1 (3): 310-317

    View details for DOI 10.1109/TCPMT.2010.2100711

    View details for Web of Science ID 000292780700004

  • 3-D visualization of flow in microscale jet impingement systems INTERNATIONAL JOURNAL OF THERMAL SCIENCES Won, Y., Wang, E. N., Goodson, K. E., Kenny, T. W. 2011; 50 (3): 325-331

    View details for DOI 10.1016/j.ijthermalsci.2010.08.005

    View details for Web of Science ID 000287285700012

  • Active Electrostatic Compensation of Micromechanical Resonators Under Random Vibrations JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Yoneoka, S., Salvia, J. C., Bahl, G., Melamud, R., Chandorkar, S. A., Kenny, T. W. 2010; 19 (5): 1270-1272

    View details for DOI 10.1109/JMEMS.2010.2067444

    View details for Web of Science ID 000283369500028

  • Effect of fibril shape on adhesive properties APPLIED PHYSICS LETTERS Soto, D., Hill, G., Parness, A., Esparza, N., Cutkosky, M., Kenny, T. 2010; 97 (5)

    View details for DOI 10.1063/1.3464553

    View details for Web of Science ID 000281059500064

  • What is the Young's Modulus of Silicon? JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Hopcroft, M. A., Nix, W. D., Kenny, T. W. 2010; 19 (2): 229-238

    View details for DOI 10.1109/JMEMS.2009.2039697

    View details for Web of Science ID 000276257700001

  • Characterization of Encapsulated Micromechanical Resonators Sealed and Coated With Polycrystalline SiC JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Yoneoka, S., Roper, C. S., Candler, R. N., Chandorkar, S. A., Graham, A. B., Provine, J., Maboudian, R., Howe, R. T., Kenny, T. W. 2010; 19 (2): 357-366

    View details for DOI 10.1109/JMEMS.2010.2040460

    View details for Web of Science ID 000276257700014

  • A Method for Wafer-Scale Encapsulation of Large Lateral Deflection MEMS Devices JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Graham, A. B., Messana, M. W., Hartwell, P. G., Provine, J., Yoneoka, S., Melamud, R., Kim, B., Howe, R. T., Kenny, T. W. 2010; 19 (1): 28-37

    View details for DOI 10.1109/JMEMS.2009.2035717

    View details for Web of Science ID 000274213700003

  • Real-Time Temperature Compensation of MEMS Oscillators Using an Integrated Micro-Oven and a Phase-Locked Loop JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Salvia, J. C., Melamud, R., Chandorkar, S. A., Lord, S. F., Kenny, T. W. 2010; 19 (1): 192-201

    View details for DOI 10.1109/JMEMS.2009.2035932

    View details for Web of Science ID 000274213700019

  • Model and Observations of Dielectric Charge in Thermally Oxidized Silicon Resonators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Bahl, G., Melamud, R., Kim, B., Chandorkar, S. A., Salvia, J. C., Hopcroft, M. A., Elata, D., Hennessy, R. G., Candler, R. N., Howe, R. T., Kenny, T. W. 2010; 19 (1): 162-174

    View details for DOI 10.1109/JMEMS.2009.2036274

    View details for Web of Science ID 000274213700016

  • Development of wafer scale encapsulation process for large displacement piezoresistive MEMS devices SENSORS AND ACTUATORS A-PHYSICAL Ayanoor-Vitikkate, V., Chen, K., Park, W., Kenny, T. W. 2009; 156 (2): 275-283

    View details for DOI 10.1016/j.sna.2009.09.001

    View details for Web of Science ID 000272563900001

  • Temperature-Insensitive Composite Micromechanical Resonators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Melamud, R., Chandorkar, S. A., Kim, B., Lee, H. K., Salvia, J. C., Bahl, G., Hopcroft, M. A., Kenny, T. W. 2009; 18 (6): 1409-1419

    View details for DOI 10.1109/JMEMS.2009.2030074

    View details for Web of Science ID 000272318900027

  • Performance Evaluation and Equivalent Model of Silicon Interconnects for Fully-Encapsulated RF MEMS Devices IEEE TRANSACTIONS ON ADVANCED PACKAGING Chen, K., Salvia, J., Potter, R., Howe, R. T., Kenny, T. W. 2009; 32 (2): 402-409

    View details for DOI 10.1109/TADVP.2008.2005114

    View details for Web of Science ID 000266778000018

  • Multimode thermoelastic dissipation JOURNAL OF APPLIED PHYSICS Chandorkar, S. A., Candler, R. N., Duwel, A., Melamud, R., Agarwal, M., Goodson, K. E., Kenny, T. W. 2009; 105 (4)

    View details for DOI 10.1063/1.3072682

    View details for Web of Science ID 000263803300018

  • Hermeticity and diffusion investigation in polysilicon film encapsulation for microelectromechanical systems JOURNAL OF APPLIED PHYSICS Kim, B., Candler, R. N., Melamud, R., Hopcroft, M. A., Yoneoka, S., Lee, H. K., Agarwal, M., Chandorkar, S. A., Yama, G., Kenny, T. W. 2009; 105 (1)

    View details for DOI 10.1063/1.3054366

    View details for Web of Science ID 000262534100047

  • Acceleration insensitive encapsulated silicon microresonator APPLIED PHYSICS LETTERS Jha, C. M., Salvia, J., Chandorkar, S. A., Melamud, R., Kuhl, E., Kenny, T. W. 2008; 93 (23)

    View details for DOI 10.1063/1.3036536

    View details for Web of Science ID 000261699700087

  • Temperature dependence of quality factor in MEMS resonators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Kim, B., Hopcroft, M. A., Candler, R. N., Jha, C. M., Agarwal, M., Melamud, R., Chandorkar, S. A., Yama, G., Kenny, T. W. 2008; 17 (3): 755-766

    View details for DOI 10.1109/JMEMS.2008.924253

    View details for Web of Science ID 000256626300023

  • Mission results for Sapphire, a student-built satellite ACTA ASTRONAUTICA Swartwout, M., Kitts, C., Twiggs, R., Kenny, T., Smith, B. R., Lu, R., Stattenfield, K., Pranajaya, F. 2008; 62 (8-9): 521-538

    View details for DOI 10.1016/j.actaastro.2008.01.009

    View details for Web of Science ID 000255445100008

  • A study of electrostatic force nonlinearities in resonant microstructures APPLIED PHYSICS LETTERS Agarwal, M., Chandorkar, S. A., Mehta, H., Candler, R. N., Kim, B., Hopcroft, M. A., Melamud, R., Jha, C. M., Bahl, G., Yama, G., Kenny, T. W., Murmann, B. 2008; 92 (10)

    View details for DOI 10.1063/1.2834707

    View details for Web of Science ID 000253989300168

  • Thermal isolation of encapsulated MEMS resonators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Jha, C. M., Hopcroft, M. A., Chandorkar, S. A., Salvia, J. C., Agarwal, M., Candler, R. N., Melamud, R., Kim, B., Kenny, T. W. 2008; 17 (1): 175-184

    View details for DOI 10.1109/JMEMS.2007.904332

    View details for Web of Science ID 000253259600020

  • Ultraminiature encapsulated accelerometers as a fully implantable sensor for implantable hearing aids BIOMEDICAL MICRODEVICES Park, W., O'Connor, K. N., Chen, K., Mallon, J. R., Maetani, T., Dalal, P., Candler, R. N., Ayanoor-Vitikkate, V., Roberson, J. B., Puria, S., Kenny, T. W. 2007; 9 (6): 939-949

    Abstract

    Experiments were conducted to evaluate a silicon accelerometer as an implantable sound sensor for implantable hearing aids. The main motivation of this study is to find an alternative sound sensor that is implantable inside the body, yet does not suffer from the signal attenuation from the body. The merit of the accelerometer sensor as a sound sensor will be that it will utilize the natural mechanical conduction in the middle ear as a source of the vibration. With this kind of implantable sound sensor, a totally implantable hearing aid is feasible. A piezoresistive silicon accelerometer that is completely encapsulated with a thin silicon film and long flexible flex-circuit electrical cables were used for this study. The sensor is attached on the middle ear ossicles and measures the vibration transmitted from the tympanic membrane due to the sound in the ear canal. In this study, the sensor is fully characterized on a human cadaveric temporal bone preparation.

    View details for DOI 10.1007/s10544-007-9072-4

    View details for Web of Science ID 000250462200019

    View details for PubMedID 17574533

  • Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators JOURNAL OF APPLIED PHYSICS Agarwal, M., Mehta, H., Candler, R. N., Chandorkar, S. A., Kim, B., Hopcroft, M. A., Melamud, R., Bahl, G., Yama, G., Kenny, T. W., Murmann, B. 2007; 102 (7)

    View details for DOI 10.1063/1.2785018

    View details for Web of Science ID 000250147700148

  • High resolution microresonator-based digital temperature sensor APPLIED PHYSICS LETTERS Jha, C. M., Bahl, G., Melamud, R., Chandorkar, S. A., Hopcroft, M. A., Kim, B., Agarwal, M., Salvia, J., Mehta, H., Kenny, T. W. 2007; 91 (7)

    View details for DOI 10.1063/1.2768629

    View details for Web of Science ID 000248866600117

  • Using the temperature dependence of resonator quality factor as a thermometer APPLIED PHYSICS LETTERS Hopcroft, M. A., Kim, B., Chandorkar, S., Melamud, R., Agarwal, M., Jha, C. M., Bahl, G., Salvia, J., Mehta, H., Lee, H. K., Candler, R. N., Kenny, T. W. 2007; 91 (1)

    View details for DOI 10.1063/1.2753758

    View details for Web of Science ID 000247819700074

  • Temperature-compensated high-stability silicon resonators APPLIED PHYSICS LETTERS Melamud, R., Kim, B., Chandorkar, S. A., Hopcroft, M. A., Agarwal, M., Jha, C. M., Kenny, T. W. 2007; 90 (24)

    View details for DOI 10.1063/1.2748092

    View details for Web of Science ID 000247305400116

  • A multiaxis force sensor for the study of insect biomechanics JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Bartsch, M. S., Federle, W., Full, R. J., Kenny, T. W. 2007; 16 (3): 709-718

    View details for DOI 10.1109/JMEMS.2007.893677

    View details for Web of Science ID 000247219200025

  • Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators SENSORS AND ACTUATORS A-PHYSICAL Kim, B., Candler, R. N., Hopcroft, M. A., Agarwal, M., Park, W., Kenny, T. W. 2007; 136 (1): 125-131

    View details for DOI 10.1016/j.sna.2006.10.040

    View details for Web of Science ID 000246463000014

  • Wafer-scale fabrication of infrared detectors based on tunneling displacement transducers SENSORS AND ACTUATORS A-PHYSICAL Ajakaiye, A., Grade, J., Shin, C., Kenny, T. 2007; 134 (2): 575-581

    View details for DOI 10.1016/j.sna.2005.07.028

    View details for Web of Science ID 000245319900038

  • Inhibition of metalloprotease botulinum serotype A from a pseudo-peptide binding mode to a small molecule that is active in primary neurons JOURNAL OF BIOLOGICAL CHEMISTRY Burnett, J. C., Ruthel, G., Stegmann, C. M., Panchal, R. G., Nguyen, T. L., Hermone, A. R., Stafford, R. G., Lane, D. J., Kenny, T. A., McGrath, C. F., Wipf, P., Stahl, A. M., Schmidt, J. J., Gussio, R., Brunger, A. T., Bavari, S. 2007; 282 (7): 5004-5014

    Abstract

    An efficient research strategy integrating empirically guided, structure-based modeling and chemoinformatics was used to discover potent small molecule inhibitors of the botulinum neurotoxin serotype A light chain. First, a modeled binding mode for inhibitor 2-mercapto-3-phenylpropionyl-RATKML (K(i) = 330 nM) was generated, and required the use of a molecular dynamic conformer of the enzyme displaying the reorientation of surface loops bordering the substrate binding cleft. These flexible loops are conformationally variable in x-ray crystal structures, and the model predicted that they were pivotal for providing complementary binding surfaces and solvent shielding for the pseudo-peptide. The docked conformation of 2-mercapto-3-phenylpropionyl-RATKML was then used to refine our pharmacophore for botulinum serotype A light chain inhibition. Data base search queries derived from the pharmacophore were employed to mine small molecule (non-peptidic) inhibitors from the National Cancer Institute's Open Repository. Four of the inhibitors possess K(i) values ranging from 3.0 to 10.0 microM. Of these, NSC 240898 is a promising lead for therapeutic development, as it readily enters neurons, exhibits no neuronal toxicity, and elicits dose-dependent protection of synaptosomal-associated protein (of 25 kDa) in a primary culture of embryonic chicken neurons. Isothermal titration calorimetry showed that the interaction between NSC 240898 and the botulinum A light chain is largely entropy-driven, and occurs with a 1:1 stoichiometry and a dissociation constant of 4.6 microM.

    View details for DOI 10.1074/jbc.M608166200

    View details for Web of Science ID 000244482000083

    View details for PubMedID 17092934

  • Acceleration sensitivity in beam-type electrostatic microresonators APPLIED PHYSICS LETTERS Agarwal, M., Park, K. K., Chandorkar, S. A., Candler, R. N., Kim, B., Hopcroft, M. A., Melamud, R., Kenny, T. W., Murmann, B. 2007; 90 (1)

    View details for DOI 10.1063/1.2426884

    View details for Web of Science ID 000243379900112

  • Long-term and accelerated life testing of a novel single-wafer vacuum encapsulation for MEMS resonators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Candler, R. N., Hopcroft, M. A., Kim, B., Park, W., Melamud, R., Agarwal, M., Yama, G., Partridge, A., Lutz, M., Kenny, T. W. 2006; 15 (6): 1446-1456

    View details for DOI 10.1109/JMEMS.2006.883586

    View details for Web of Science ID 000242983300004

  • Engineering MEMS resonators with low thermoelastic damping JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Duwel, A., Candler, R. N., Kenny, T. W., Varghese, M. 2006; 15 (6): 1437-1445

    View details for DOI 10.1109/JMEMS.2006.883573

    View details for Web of Science ID 000242983300003

  • Optimal drive condition for nonlinearity reduction in electrostatic microresonators APPLIED PHYSICS LETTERS Agarwal, M., Chandorkar, S. A., Candler, R. N., Kim, B., Hopcroft, M. A., Melamud, R., Jha, C. M., Kenny, T. W., Murmann, B. 2006; 89 (21)

    View details for DOI 10.1063/1.2388886

    View details for Web of Science ID 000242220000087

  • Impact of geometry on thermoelastic dissipation in micromechanical resonant beams JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Candler, R. N., Duwel, A., Varghese, M., Chandorkar, S. A., Hopcroft, M. A., Park, W., Kim, B., Yama, G., Partridge, A., Lutz, M., Kenny, T. W. 2006; 15 (4): 927-934

    View details for DOI 10.1109/JMEMS.2006.879374

    View details for Web of Science ID 000239712600023

  • A hybrid method for bubble geometry reconstruction in two-phase microchannels EXPERIMENTS IN FLUIDS Wang, E. N., Devasenathipathy, S., Lin, H., Hidrovo, C. H., Santiago, J. G., Goodson, K. E., Kenny, T. W. 2006; 40 (6): 847-858

    View details for DOI 10.1007/s00348-006-0123-z

    View details for Web of Science ID 000239549100003

  • Encapsulated submillimeter piezoresistive accelerometers JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Park, W., Partridge, A., Candler, R. N., Ayanoor-Vitikkate, V., Yama, G., Lutz, M., Kenny, T. W. 2006; 15 (3): 507-514

    View details for DOI 10.1109/JMEMS.2006.876648

    View details for Web of Science ID 000238311000007

  • Two-phase microfluidics for semiconductor circuits and fuel cells HEAT TRANSFER ENGINEERING Hidrovo, C. H., Kramer, T. A., Wang, E. N., Vigneron, E., Steinbrenner, J. E., Koo, J. M., Wang, F. M., Fogg, D. W., Flynn, R. D., Lee, E. S., Cheng, C. H., Kenny, T. W., Eaton, J. K., Goodson, K. E. 2006; 27 (4): 53-63

    View details for DOI 10.1080/01457630500523816

    View details for Web of Science ID 000236239500006

  • Phase change phenomena in silicon microchannels INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER Zhang, L. A., Wang, E. N., Goodson, K. E., Kenny, T. W. 2005; 48 (8): 1572-1582

    View details for DOI 10.1016/j.ijheatmasstransfer.2004.09.048

    View details for Web of Science ID 000228228400015

  • Micromachined jets for liquid impingement cooling of VLSI chips (vol 13, pg 833, 2004) JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Wang, E. N., Zhang, L., Jiang, L. N., Koo, J. M., Maveety, J. G., Sanchez, E. A., Goodson, K. E., Kenny, T. W. 2004; 13 (6): 1072-1072

    View details for DOI 10.1109/JMEMS.2004.840851

    View details for Web of Science ID 000225515100022

  • Micromachined jets for liquid impingement cooling of VLSI chips JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Wang, E. N., Zhang, L., Jiang, L. N., Koo, J. M., Maveety, J. G., Sanchez, E. A., Goodson, K. E., Kenny, T. W. 2004; 13 (5): 833-842

    View details for DOI 10.1109/JMEMS.2004.835768

    View details for Web of Science ID 000224413100014

  • Comparison of thermal and piezoresistive sensing approaches for atomic force microscopy topography measurements APPLIED PHYSICS LETTERS King, W. P., Kenny, T. W., Goodson, K. E. 2004; 85 (11): 2086-2088

    View details for DOI 10.1063/1.1787160

    View details for Web of Science ID 000223923300073

  • Fatigue crack growth in micro-machined single-crystal silicon JOURNAL OF MATERIALS RESEARCH Renuart, E. D., Fitzgerald, A. M., Kenny, T. W., Dauskardt, R. H. 2004; 19 (9): 2635-2640

    View details for DOI 10.1557/JMR.2004.0343

    View details for Web of Science ID 000223689000017

  • Nucleation and growth of vapor bubbles in a heated silicon microchannel JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME Wang, E. N., Devasenathipathy, S., Santiago, J. G., Goodson, K. E., Kenny, T. W. 2004; 126 (4): 497-497

    View details for Web of Science ID 000223989100004

  • Measurement system for low force and small displacement contacts JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Pruitt, B. L., Park, W. T., Kenny, T. W. 2004; 13 (2): 220-229

    View details for Web of Science ID 000220759300008

  • High speed particles separation using ultrasound for microTAS and lab-on-a-chip application. Conference proceedings : ... Annual International Conference of the IEEE Engineering in Medicine and Biology Society. IEEE Engineering in Medicine and Biology Society. Conference Li, H., Kenny, T. 2004; 4: 2631-2634

    Abstract

    Engineers have long envisioned that a handheld portable blood diagnosis device would be able to give an accurate measurement of chemical content based on a very small sample in the shortest time possible. One of the immediate applications of such device is the point of care (POC) diagnosis system, whereby a single drop of human blood would determine his health status. However, a major technical challenge lies in the ability to separate different particles, which in the case of human blood, is to separate red and white blood cells and plasma in a quick, cheap, reliable device with low power consumption. In this paper, we present some preliminary results from our tests of ultrasound standing waves as a potential separation mechanism for blood cells. Also, we report on the study of the behavior of suspended particles of the size equivalent to a human cell under the influence of ultrasonic acoustic field, using micro particle image velocimetry (PIV) measurement technique. This provides the fundamental understanding and foundation of designing an integrated microchannel structure that can provide ultrasonic cell separation in the microscale regime. The study has shown promising results of successfully separating two different particles based on their sizes difference.

    View details for PubMedID 17270815

  • Measurements of cooling by room-temperature thermionic emission across a nanometer gap JOURNAL OF APPLIED PHYSICS Hishinuma, Y., Geballe, T. H., Moyzhes, B. Y., Kenny, T. W. 2003; 94 (7): 4690-4696

    View details for DOI 10.1063/1.1606852

    View details for Web of Science ID 000185420900071

  • Stress wave interference effects during fracture of silicon micromachined specimens EXPERIMENTAL MECHANICS Fitzgerald, A. M., Kenny, T. W., Dauskardt, R. H. 2003; 43 (3): 317-322

    View details for Web of Science ID 000185166800011

  • Single wafer encapsulation of MEMS devices IEEE TRANSACTIONS ON ADVANCED PACKAGING Candler, R. N., Park, W. T., Li, H. M., Yama, G., Partridge, A., Lutz, M., Kenny, T. W. 2003; 26 (3): 227-232

    View details for DOI 10.1109/TADVP.2003.818062

    View details for Web of Science ID 000185862400003

  • Design of piezoresistive MEMS-based accelerometer for integration with wireless sensing unit for structural monitoring JOURNAL OF AEROSPACE ENGINEERING Lynch, J. P., Partridge, A., Law, K. H., Kenny, T. W., Kiremidjian, A. S., Carryer, E. 2003; 16 (3): 108-114

    View details for DOI 10.1016/(ASCE)0893-1321(2003)16:3(108)

    View details for Web of Science ID 000183657900002

  • Design of large deflection electrostatic actuators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Grade, J. D., Jerman, H., Kenny, T. W. 2003; 12 (3): 335-343

    View details for DOI 10.1109/JMEMS.2003.811750

    View details for Web of Science ID 000183356300013

  • Piezoresistive cantilevers and measurement system for characterizing low force electrical contacts SENSORS AND ACTUATORS A-PHYSICAL Pruitt, B. L., Kenny, T. W. 2003; 104 (1): 68-77

    View details for DOI 10.1016/S0924-4247(02)00485-5

    View details for Web of Science ID 000181236100011

  • Embedment of structural monitoring algorithms in a wireless sensing unit STRUCTURAL ENGINEERING AND MECHANICS Lynch, J. P., Sundararajan, A., Law, K. H., Kiremidjian, A. S., Kenny, T., Carryer, E. 2003; 15 (3): 285-297

    View details for Web of Science ID 000181569500002

  • On-chip coupling of isoelectric focusing and free solution electrophoresis for multidimensional separations ANALYTICAL CHEMISTRY Herr, A. E., Molho, J. I., Drouvalakis, K. A., Mikkelsen, J. C., Utz, P. J., Santiago, J. G., Kenny, T. W. 2003; 75 (5): 1180-1187

    Abstract

    We have developed an acrylic microfluidic device that sequentially couples liquid-phase isoelectric focusing (IEF) and free solution capillary electrophoresis (CE). Rapid separation (<1 min) and preconcentration (73x) of species were achieved in the initial IEF dimension. Using full-field fluorescence imaging, we observed nondispersive mobilization velocities on the order of 20 microm/s during characterization of the IEF step. This transport behavior allowed controlled electrokinetic mobilization of focused sample bands to a channel junction, where voltage switching was used to repeatedly inject effluent from the IEF dimension into an ampholyte-based CE separation. This second dimension was capable of analyzing all fluid volumes of interest from the IEF dimension, as IEF was 'parked' during each CE analysis and refocused prior to additional CE analyses. Investigation of each dimension of the integrated system showed time-dependent species displacement and band-broadening behavior consistent with IEF and CE, respectively. The peak capacity of the 2D system was approximately 1300. A comprehensive 2D analysis of a fluid volume spanning 15% of the total IEF channel length was completed in less than 5 min.

    View details for DOI 10.1021/ac026239a

    View details for Web of Science ID 000181259300027

    View details for PubMedID 12641239

  • Design of atomic force microscope cantilevers for combined thermomechanical writing and thermal reading in array operation JOURNAL OF MICROELECTROMECHANICAL SYSTEMS King, W. P., Kenny, T. W., Goodson, K. E., Cross, G. L., Despont, M., Durig, U. T., Rothuizen, H., Binnig, G., Vettiger, P. 2002; 11 (6): 765-774

    View details for DOI 10.1109/JMEMS.2002.803283

    View details for Web of Science ID 000179740900017

  • Process compatible polysilicon-based electrical through-wafer interconnects in silicon substrates JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Chow, E. M., Chandrasekaran, V., Partridge, A., Nishida, T., Sheplak, M., Quate, C. F., Kenny, T. W. 2002; 11 (6): 631-640

    View details for DOI 10.1109/JMEMS.2002.805206

    View details for Web of Science ID 000179740900002

  • Vacuum thermionic refrigeration with a semiconductor heterojunction structure APPLIED PHYSICS LETTERS Hishinuma, Y., Moyzhes, B. Y., Geballe, T. H., Kenny, T. W. 2002; 81 (22): 4242-4244

    View details for DOI 10.1063/1.1523653

    View details for Web of Science ID 000179340800048

  • Evidence for van der Waals adhesion in gecko setae PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA Autumn, K., Sitti, M., Liang, Y. C., Peattie, A. M., Hansen, W. R., Sponberg, S., Kenny, T. W., Fearing, R., Israelachvili, J. N., Full, R. J. 2002; 99 (19): 12252-12256

    Abstract

    Geckos have evolved one of the most versatile and effective adhesives known. The mechanism of dry adhesion in the millions of setae on the toes of geckos has been the focus of scientific study for over a century. We provide the first direct experimental evidence for dry adhesion of gecko setae by van der Waals forces, and reject the use of mechanisms relying on high surface polarity, including capillary adhesion. The toes of live Tokay geckos were highly hydrophobic, and adhered equally well to strongly hydrophobic and strongly hydrophilic, polarizable surfaces. Adhesion of a single isolated gecko seta was equally effective on the hydrophobic and hydrophilic surfaces of a microelectro-mechanical systems force sensor. A van der Waals mechanism implies that the remarkable adhesive properties of gecko setae are merely a result of the size and shape of the tips, and are not strongly affected by surface chemistry. Theory predicts greater adhesive forces simply from subdividing setae to increase surface density, and suggests a possible design principle underlying the repeated, convergent evolution of dry adhesive microstructures in gecko, anoles, skinks, and insects. Estimates using a standard adhesion model and our measured forces come remarkably close to predicting the tip size of Tokay gecko seta. We verified the dependence on size and not surface type by using physical models of setal tips nanofabricated from two different materials. Both artificial setal tips stuck as predicted and provide a path to manufacturing the first dry, adhesive microstructures.

    View details for DOI 10.1073/pnas.192252799

    View details for Web of Science ID 000178187000048

    View details for PubMedID 12198184

  • Subcritical crack growth in single-crystal silicon using micromachined specimens JOURNAL OF MATERIALS RESEARCH Fitzgerald, A. M., Iyer, R. S., Dauskardt, R. H., Kenny, T. W. 2002; 17 (3): 683-692

    View details for Web of Science ID 000174300000027

  • Measurements and modeling of two-phase flow in microchannels with nearly constant heat flux boundary conditions JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Zhang, L., Koo, J. M., Jiang, L., Asheghi, M., Goodson, K. E., Santiago, J. G., Kenny, T. W. 2002; 11 (1): 12-19

    View details for Web of Science ID 000173751000002

  • Characterization of a two-dimensional cantilever array with through-wafer electrical interconnects APPLIED PHYSICS LETTERS Chow, E. M., Yaralioglu, G. G., Quate, C. F., Kenny, T. W. 2002; 80 (4): 664-666

    View details for Web of Science ID 000173508900044

  • Electron spin relaxation near a micron-size ferromagnet PHYSICAL REVIEW LETTERS Stipe, B. C., Mamin, H. J., Yannoni, C. S., Stowe, T. D., Kenny, T. W., Rugar, D. 2001; 87 (27)

    Abstract

    Magnetic resonance force microscopy was used to study the behavior of small ensembles of unpaired electron spins in silica near a micrometer-size ferromagnetic tip. Using a cantilever-driven spin manipulation protocol and a magnetic field gradient greater than 10(5) T/m, signals from as few as 100 net spins within a 20 nm thick resonant slice could be studied. A sixfold increase in the spin-lattice relaxation rate was found within 800 nm of the ferromagnet, while no effect due to silica surface proximity was detected. The results are interpreted in terms of Larmor-frequency magnetic field fluctuations emanating from the ferromagnet.

    View details for DOI 10.1103/PhysRevLett.87.277602

    View details for Web of Science ID 000173040800056

    View details for PubMedID 11800915

  • A high-stiffness axial resonant probe for atomic force microscopy JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Harley, J. A., Kenny, T. W. 2001; 10 (3): 434-441

    View details for Web of Science ID 000170875900013

  • A high-precision, wide-bandwidth micromachined tunneling accelerometer JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Liu, C. H., Kenny, T. W. 2001; 10 (3): 425-433

    View details for Web of Science ID 000170875900012

  • Noncontact friction and force fluctuations between closely spaced bodies PHYSICAL REVIEW LETTERS Stipe, B. C., Mamin, H. J., Stowe, T. D., Kenny, T. W., Rugar, D. 2001; 87 (9)

    Abstract

    Noncontact friction between a Au(111) surface and an ultrasensitive gold-coated cantilever was measured as a function of tip-sample spacing, temperature, and bias voltage using observations of cantilever damping and Brownian motion. The importance of the inhomogeneous contact potential is discussed and comparison is made to measurements over dielectric surfaces. Using the fluctuation-dissipation theorem, the force fluctuations are interpreted in terms of near-surface fluctuating electric fields interacting with static surface charge.

    View details for DOI 10.1103/PhysRevLett.87.096801

    View details for Web of Science ID 000170698000030

    View details for PubMedID 11531586

  • Nanometer-Scale Force Sensing with MEMS Devices IEEE SENSORS JOURNAL Kenny, T. 2001; 1 (2): 148-157

    View details for DOI 10.1109/JSEN.2001.936932

    View details for Web of Science ID 000208325600006

  • Refrigeration by combined tunneling and thermionic emission in vacuum: Use of nanometer scale design APPLIED PHYSICS LETTERS Hishinuma, Y., Geballe, T. H., Moyzhes, B. Y., Kenny, T. W. 2001; 78 (17): 2572-2574

    View details for Web of Science ID 000168304600053

  • Magnetic dissipation and fluctuations in individual nanomagnets measured by ultrasensitive cantilever magnetometry PHYSICAL REVIEW LETTERS Stipe, B. C., Mamin, H. J., Stowe, T. D., Kenny, T. W., Rugar, D. 2001; 86 (13): 2874-2877

    Abstract

    Cantilever magnetometry with moment resolution better than 10(4)micro(B) was used to study individual nanomagnets. By using the fluctuation-dissipation theorem to interpret measurements of field-induced cantilever damping, the low frequency spectral density of magnetic fluctuations could be determined with resolution better than 1micro(B) Hz-1/2. Cobalt nanowires exhibited significant magnetic dissipation and the associated magnetic fluctuations were found to have 1/f frequency dependence. In individual submicron rare-earth alloy magnets, the dissipation/fluctuation was very small and not distinguishable from that of a bare silicon cantilever.

    View details for Web of Science ID 000167693000044

    View details for PubMedID 11290061

  • Optimization of turn geometries for microchip electrophoresis ANALYTICAL CHEMISTRY Molho, J. I., Herr, A. E., Mosier, B. P., Santiago, J. G., Kenny, T. W., Brennen, R. A., Gordon, G. B., Mohammadi, B. 2001; 73 (6): 1350-1360

    View details for Web of Science ID 000167546400042

  • Adventures in attonewton force detection APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING Rugar, D., Stipe, B. C., Mamin, H. J., Yannoni, C. S., Stowe, T. D., Yasumura, K. Y., Kenny, T. W. 2001; 72: S3-S10

    View details for DOI 10.1007/s003390100729

    View details for Web of Science ID 000205245800002

  • Atomic force microscope cantilevers for combined thermomechanical data writing and reading APPLIED PHYSICS LETTERS King, W. P., Kenny, T. W., Goodson, K. E., Cross, G., Despont, M., Durig, U., Rothuizen, H., Binnig, G. K., Vettiger, P. 2001; 78 (9): 1300-1302

    View details for Web of Science ID 000167151000044

  • Adhesive force of a single gecko foot-hair NATURE Autumn, K., Liang, Y. A., Hsieh, S. T., Zesch, W., Chan, W. P., Kenny, T. W., Fearing, R., Full, R. J. 2000; 405 (6787): 681-685

    Abstract

    Geckos are exceptional in their ability to climb rapidly up smooth vertical surfaces. Microscopy has shown that a gecko's foot has nearly five hundred thousand keratinous hairs or setae. Each 30-130 microm long seta is only one-tenth the diameter of a human hair and contains hundreds of projections terminating in 0.2-0.5 microm spatula-shaped structures. After nearly a century of anatomical description, here we report the first direct measurements of single setal force by using a two-dimensional micro-electromechanical systems force sensor and a wire as a force gauge. Measurements revealed that a seta is ten times more effective at adhesion than predicted from maximal estimates on whole animals. Adhesive force values support the hypothesis that individual seta operate by van der Waals forces. The gecko's peculiar behaviour of toe uncurling and peeling led us to discover two aspects of setal function which increase their effectiveness. A unique macroscopic orientation and preloading of the seta increased attachment force 600-fold above that of frictional measurements of the material. Suitably orientated setae reduced the forces necessary to peel the toe by simply detaching above a critical angle with the substratum.

    View details for Web of Science ID 000087465800046

    View details for PubMedID 10864324

  • 1/F noise considerations for the design and process optimization of piezoresistive cantilevers JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Harley, J. A., Kenny, T. W. 2000; 9 (2): 226-235

    View details for Web of Science ID 000087842600008

  • Quality factors in micron- and submicron-thick cantilevers JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Yasumura, K. Y., Stowe, T. D., Chow, E. M., Pfafman, T., Kenny, T. W., Stipe, B. C., Rugar, D. 2000; 9 (1): 117-125

    View details for Web of Science ID 000085857600017

  • Electroosmotic capillary flow with nonuniform zeta potential ANALYTICAL CHEMISTRY Herr, A. E., Molho, J. I., Santiago, J. G., Mungal, M. G., Kenny, T. W., Garguilo, M. G. 2000; 72 (5): 1053-1057

    View details for Web of Science ID 000085605100043

  • Electroosmotic capillary flow with nonuniform zeta potential Analytical chemistry Herr, A. E., Molho, J. I., Santiago, J. G., Mungal, M. G., Kenny, T. W., Garguilo, M. G. 2000; 72 (5): 1053-7

    Abstract

    The present work is an analytical and experimental study of electroosmotic flow (EOF) in cylindrical capillaries with nonuniform wall surface charge (zeta-potential) distributions. In particular, this study investigates perturbations of electroosmotic flow in open capillaries that are due to induced pressure gradients resulting from axial variations in the wall zeta-potential. The experimental inquiry focuses on electroosmotic flow under a uniform applied field in capillaries with an EOF-suppressing polymer adsorbed onto various fractions of the total capillary length. This fractional EOF suppression was achieved by coupling capillaries with substantially different zeta-potentials. The resulting flow fields were imaged with a nonintrusive, caged-fluorescence imaging technique. Simple analytical models for the velocity field and rate of sample dispersion in capillaries with axial zeta-potential variations are presented. The resulting induced pressure gradients and the associated band-broadening effects are of particular importance to the performance of chemical and biochemical analysis systems such as capillary electrokinetic chromatography and capillary zone electrophoresis.

    View details for PubMedID 10739211

  • Silicon dopant imaging by dissipation force microscopy APPLIED PHYSICS LETTERS Stowe, T. D., Kenny, T. W., Thomson, D. J., Rugar, D. 1999; 75 (18): 2785-2787

    View details for Web of Science ID 000083295500027

  • An integrated controller for tunnel sensors IEEE JOURNAL OF SOLID-STATE CIRCUITS Partridge, A., Reynolds, J. K., Grade, J. D., Kane, B. J., Maluf, N. I., Kovacs, G. T., Kenny, T. W. 1999; 34 (8): 1099-1107

    View details for Web of Science ID 000081755500009

  • High-sensitivity piezoresistive cantilevers under 1000 angstrom thick APPLIED PHYSICS LETTERS Harley, J. A., Kenny, T. W. 1999; 75 (2): 289-291

    View details for Web of Science ID 000081265200047

  • Intrinsic-carrier thermal runaway in silicon microcantilevers MICROSCALE THERMOPHYSICAL ENGINEERING Chui, B. W., Asheghi, M., Ju, Y. S., Goodson, K. E., Kenny, T. W., Mamin, H. J. 1999; 3 (3): 217-228

    View details for Web of Science ID 000082536200006

  • Ultrahigh-density atomic force microscopy data storage with erase capability APPLIED PHYSICS LETTERS Binnig, G., Despont, M., Drechsler, U., Haberle, W., Lutwyche, M., Vettiger, P., Mamin, H. J., Chui, B. W., Kenny, T. W. 1999; 74 (9): 1329-1331

    View details for Web of Science ID 000079010000047

  • Technique for measurement of the noise of a sensor in the presence of large background signals REVIEW OF SCIENTIFIC INSTRUMENTS Barzilai, A., VanZandt, T., Kenny, T. 1998; 69 (7): 2767-2772

    View details for Web of Science ID 000075279200030

  • Characterization of a high-sensitivity micromachined tunneling accelerometer with micro-g resolution JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Liu, C. H., Barzilai, A. M., Reynolds, J. K., Partridge, A., Kenny, T. W., Grade, J. D., Rockstad, H. K. 1998; 7 (2): 235-244

    View details for Web of Science ID 000073957900012

  • Independent detection of vertical and lateral forces with a sidewall-implanted dual-axis piezoresistive cantilever APPLIED PHYSICS LETTERS Chui, B. W., Kenny, T. W., Mamin, H. J., Terris, B. D., Rugar, D. 1998; 72 (11): 1388-1390

    View details for Web of Science ID 000072566000043

  • Low-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high-density AFM thermomechanical data storage JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Chui, B. W., Stowe, T. D., Ju, Y. S., Goodson, K. E., Kenny, T. W., Mamin, H. J., Terris, B. D., Ried, R. P., Rugar, D. 1998; 7 (1): 69-78

    View details for Web of Science ID 000073005900009

  • Attonewton force detection using ultrathin silicon cantilevers APPLIED PHYSICS LETTERS Stowe, T. D., Yasumura, K., Kenny, T. W., Botkin, D., Wago, K., Rugar, D. 1997; 71 (2): 288-290

    View details for Web of Science ID A1997XK16000047

  • Fabrication of collimating grids for an x-ray solar telescope using LIGA methods MICROSYSTEM TECHNOLOGIES Brennen, R. A., Hecht, M. H., Wiberg, D. V., MANION, S. J., Bonivert, W. D., Hruby, J. M., Scholz, M. L., Stowe, T. D., Kenny, T. W., Jackson, K. H., Malek, C. K. 1997; 3 (3): 91-96

    View details for Web of Science ID A1997YD29700001

  • Low-stiffness silicon cantilevers for thermal writing and piezoresistive readback with the atomic force microscope APPLIED PHYSICS LETTERS Chui, B. W., Stowe, T. D., Kenny, T. W., Mamin, H. J., Terris, B. D., Rugar, D. 1996; 69 (18): 2767-2769

    View details for Web of Science ID A1996VP26500049

  • Micromachined infrared sensors using tunneling displacement transducers REVIEW OF SCIENTIFIC INSTRUMENTS Kenny, T. W., Reynolds, J. K., Podosek, J. A., Vote, E. C., Miller, L. M., Rockstad, H. K., Kaiser, W. J. 1996; 67 (1): 112-128

    View details for Web of Science ID A1996TQ62300016

  • WIDE-BANDWIDTH ELECTROMECHANICAL ACTUATORS FOR TUNNELING DISPLACEMENT TRANSDUCERS JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Kenny, T. W., Kaiser, W. J., Rockstad, H. K., Reynolds, J. K., Podosek, J. A., Vote, E. C. 1994; 3 (3): 97-104

    View details for Web of Science ID A1994RM17600002

Conference Proceedings

  • Development and characterization of a TES optical imaging array for astrophysics applications Burney, J., Bay, T. J., Brink, P. L., Cabrera, B., Castle, J. P., Romani, R. W., Tomada, A., Nam, S. W., Miller, A. J., Martinis, J., Wang, E., Kenny, T., Young, B. A. ELSEVIER SCIENCE BV. 2004: 533-536

    View details for DOI 10.1016/j.nima.2003.11.307

    View details for Web of Science ID 000220606900143

  • Closed-loop electroosmotic microchannel cooling system for VLSI circuits Jiang, L. N., Mikkelsen, J., Koo, J. M., Huber, D., Yao, S. H., Zhang, L., Zhou, P., Maveety, J. G., Prasher, R., Santiago, J. G., Kenny, T. W., Goodson, K. E. IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC. 2002: 347-355

    View details for DOI 10.1109/TCAPT.2002.800599

    View details for Web of Science ID 000180333200003

  • E-cadherin extra-cellular domain interaction examined by atomic force microscopy Rudnitsky, R. G., Drees, F., NELSON, W. J., Kenny, T. W. CELL PRESS. 2002: 55A-55A

    View details for Web of Science ID 000173252700273

  • Integration of through-wafer interconnects with a two-dimensional cantilever array Chow, E. M., Soh, H. T., Lee, H. C., Adams, J. D., Minne, S. C., Yaralioglu, G., Atalar, A., Quate, C. F., Kenny, T. W. ELSEVIER SCIENCE SA. 2000: 118-123

    View details for Web of Science ID 000087144800019

  • Fracture toughness and crack growth phenomena of plasma-etched single crystal silicon Fitzgerald, A. M., Dauskardt, R. H., Kenny, T. W. ELSEVIER SCIENCE SA. 2000: 194-199

    View details for Web of Science ID 000087144800031

  • Rapid biochemical detection and differentiation with magnetic force microscope cantilever arrays Rudnitsky, R. G., Chow, E. M., Kenny, T. W. ELSEVIER SCIENCE SA. 2000: 256-262

    View details for Web of Science ID 000087144800041

  • Packaging a piezoresistive pressure sensor to measure low absolute pressures over a wide sub-zero temperature range Reynolds, J. K., Catling, D., Blue, R. C., Maluf, N. I., Kenny, T. ELSEVIER SCIENCE SA. 2000: 142-149

    View details for Web of Science ID 000087144800023

  • Torsional force probes optimized for higher order mode suppression STOWE, T., Yasumura, K., Pfafman, T., Kenny, T., Botkin, D., Rugar, D. I E E E. 1997: 141-144

    View details for Web of Science ID A1997BJ35B00032

  • A miniature, high-sensitivity, electron tunneling accelerometer Rockstad, H. K., Tang, T. K., Reynolds, J. K., Kenny, T. W., Kaiser, W. J., Gabrielson, T. B. ELSEVIER SCIENCE SA. 1996: 227-231

    View details for Web of Science ID A1996UV64900002

  • SENSORS BASED ON TUNNELING DISPLACEMENT TRANSDUCERS - DESIGN, APPLICATIONS, AND LIMITATIONS Kenny, T. AMER CHEMICAL SOC. 1995: 50-COLL

    View details for Web of Science ID A1995QP23201561