Technology Transfer Network - Air Toxics Web Site
Rule and Implementation Information Semiconductor Manufacturing
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Rule Information
Proposed and Promulgated Rule Notices
Subpart BBBBB- National Emission Standards for Hazardous Air Pollutants: Semiconductor Manufacturing
| Date | Citation | Action | Description | File Download |
| 7/22/08 | 73 FR 42529 | Final Rule | National Emission Standards for Hazardous Air Pollutants: Semiconductor Manufacturing: Final Amendments |  |
| 10/19/06 | 71 FR 61701 | Proposed Amendment | National Emission Standards for Hazardous Air Pollutants: Semiconductor Manufacturing: Proposed Amendment | |
| 05/22/03 | 68 FR 27913 | Final Rule | National Emission Standards for Hazardous Air Pollutants: Semiconductor Manufacturing: Final Rule | |
| 05/08/02 | 67 FR 30848 | Proposed Rule | Proposed rule and notice of public hearing | |
NOTES:All files are Government Printing Office (GPO) files unless otherwise indicated.
Technical Information
Basis and Purpose Documents/Response to Comments
| 2/2001 | National Emission Standards for Hazardous Air Pollutants: Semiconductor Manufacturing-Background Information for Proposed Standards |
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FACT Sheets
| 07/15/08 | Fact Sheet - Final Amendments for Semiconductor Manufacturing |
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| 03/15/01 | Fact Sheet - Proposed Air Toxics Rule to Control Emissions from Semiconductor Manufacturing |
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| 02/28/03 | Fact Sheet - Final Air Toxics Rule to Control Emissions from Semiconductor Manufacturing |
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