Overview

This course covers the theory and fundamentals of Micro/Nano Systems Design. This course has an optional laboratory component for those students who want hands-on training in the Stanford Nanofabrication Facility.

Topics Include

• Practices for clean-room facilities
• Connecting theory of chip- and MEMS-fab processes, and the planning, execution, diagnosis, and refinement of these processes in practice
• Creation of masks and processes, and combining these to create micro- and nano- structures, layers, and regions with specified properties Operation of fab equipment (If taking the course with the hands-on component)

Units

3.0 - 5.0

• Register for 3 units if you are taking the course online. You will be covering the theory and fundamentals of Micro/Nano Systems Design, without the hands-on training in the laboratory.
• Register for 5 units if you are taking the course online AND the hands-on training in the Stanford Nanofabrication Facility. Please note that the hands-on training is NOT a requirement for the Micro/Nano Systems and Technology Graduate Certificate.

Recommended

Primary Faculty

Beth Pruitt

Assistant Professor of Mechanical Engineering
Stanford University School of Engineering

Olav Solgaard

Professor of Electrical Engineering
Stanford University School of Engineering

Certificates and Degrees

• Electrical Engineering MS Degree
• Nanotechnology: Design and Manufacturing of Intelligent Systems