Oxide Growth Calculator
Time Given Desired Thickness
Calculate
Thickness for a Given Time.
Use an interactive
Color Chart to predict the color of Silicon Oxide or Silicon Nitride at a
particular thickness.
Find information about the
Tube Furnace, which we use to grow thermal oxide.
*Constants and Equations taken from a chapter written by B. E. Deal in
Semiconductor materials and process
technology handbook : for very large scale integration (VLSI) and ultra large
scale integration (ULSI) / edited by Gary E. McGuire. (pp. 48-57)
List of Thermal Oxide Physical Constants
Property (units) |
Value |
Density (g/cm3) |
2.27 |
Dielectric Constant |
3.9 |
DC Resistivity @25°C (Ω-cm) |
1016 |
Energy gap (eV) |
~9 |
Thermal conductivity (W/cm2°C) |
0.014 |
Linear expansion coefficient (ppm/°C) |
0.05 |
Refractive index |
1.46 |
Melting Point (°C) |
~1700 |
Molecular weight |
60.08 |
Molecules/cm3 |
2.3*1022 |
Specific heat (J/g°C) |
1.0 |
Film stress (at 25°C) dynes/cm2 |
2-4 x 109 |
IR absorption peak (mm) |
9.3 |
Etch rate BHF (49%) nm/min |
100 |